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Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

 a,  a,  a,  b,  c,  a,  c,  a,  a,  c,  a,  d,  a,  a,  d,  b,  a,  a,  a,  a,  c,  e, f,  c,  f,  b
a Institute of Spectroscopy, Russian Academy of Sciences, ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
b EUV Labs, Ltd., Sirenevy bulvar 1, Troitsk, Moscow, 142191, Russian Federation
c M.V. Keldysh Institute of Applied Mathematics, Russian Academy of Sciences, Miusskaya pl. 4, Moscow, 125047, Russian Federation
d Moscow Institute of Physics and Technology (National Research University), Institutskii per. 9, Dolgoprudny, Moscow Region, 141701, Russian Federation
e Prokhorov General Physics Institute of the Russian Academy of Sciences, ul. Vavilova 38, Moscow, 119991, Russian Federation
f Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

We report on the development of plasma-based sources of extreme ultraviolet radiation for the next generation lithography and mask inspection and the development of equipment for spectral diagnostics of such sources.

Fulltext pdf (913 KB)
Fulltext is also available at DOI: 10.3367/UFNe.2018.06.038447
Keywords: EUV lithography, laser-produced plasma, radiation sources
PACS: 42.82.Cr, 52.25.Os, 52.59.−f, 52.70.−m, 52.77.−j (all)
DOI: 10.3367/UFNe.2018.06.038447
URL: https://ufn.ru/en/articles/2019/3/j/
000469214700010
2-s2.0-85070730766
2019PhyU...62..304A
Citation: Abramenko D B, Antsiferov P S, Astakhov D I, Vinokhodov A Yu, Vichev I Yu, Gayazov R R, Grushin A S, Dorokhin L A, Ivanov V V, Kim D A, Koshelev K N, Krainov P V, Krivokorytov M S, Krivtsun V M, Lakatosh B V, Lash A A, Medvedev V V, Ryabtsev A N, Sidel’nikov Yu V, Snegirev E P, Solomyannaya A D, Spiridonov M V, Tsygvintsev I P, Yakushev O F, Yakushkin A A "Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection" Phys. Usp. 62 304–314 (2019)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 28th, August 2018, 20th, June 2018

Оригинал: Абраменко Д Б, Анциферов П С, Астахов Д И, Виноходов А Ю, Вичев И Ю, Гаязов Р Р, Грушин А С, Дорохин Л А, Иванов В В, Ким Д А, Кошелев К Н, Крайнов П В, Кривокорытов М С, Кривцун В М, Лакатош Б В, Лаш А А, Медведев В В, Рябцев А Н, Сидельников Ю В, Снегирёв Е П, Соломянная А Д, Спиридонов М В, Цыгвинцев И П, Якушев О Ф, Якушкин А А «Плазменные источники экстремального ультрафиолетового излучения для литографии и сопутствующих технологических процессов (к 50-летию Института спектроскопии РАН)» УФН 189 323–334 (2019); DOI: 10.3367/UFNr.2018.06.038447

References (71) Cited by (20) Similar articles (20) ↓

  1. K.N. Koshelev, V.E. Banine, N.N. Salashchenko “Research and development in short-wave radiation sources for new-generation lithography” Phys. Usp. 50 741–744 (2007)
  2. V.N. Polkovnikov, N.N. Salashchenko et al “Beryllium-based multilayer X-ray optics” Phys. Usp. 63 83–95 (2020)
  3. A.N. Ryabtsev, S.S. Churilov “Spectroscopy of ionized atoms for astrophysics and nanotechnology” Phys. Usp. 52 282–286 (2009)
  4. N.I. Chkhalo, I.V. Malyshev et al “Diffraction limited X-ray optics: technology, metrology, applications” Phys. Usp. 63 67–82 (2020)
  5. V.I. Balykin, A.N. Ryabtsev et al “On the 40th anniversary of the Institute of Spectroscopy of the Russian Academy of Sciences (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 8 October 2008)” Phys. Usp. 52 275–309 (2009)
  6. K.N. Koshelev, V.E. Banine et al “Scientific session of the Physical Sciences Division of the Russian Academy of Sciences (31 January 2007)” Phys. Usp. 50 741–744 (2007)
  7. V.L. Bratman “Fast moving radiators and their use in high-frequency electronics” Phys. Usp. 50 303–308 (2007)
  8. A.A. Andronov, V.L. Bratman et al “Joint meeting of the Editorial Board of the Journal ’Izvestiya Vuzov. Radiofizika’ and the Scientific Council of the Institute of Applied Physics of the Russian Academy of Sciences dedicated to the ninetieth birthday of Vitalii Lazarevich Ginzburg (4 October 2006)” Phys. Usp. 50 301–303 (2007)
  9. Yu.E. Lozovik, A.M. Popov “Properties and nanotechnological applications of nanotubes” Phys. Usp. 50 749–761 (2007)
  10. V.I. Balykin “Parallel fabrication of nanostructures via atom projection” Phys. Usp. 50 744–749 (2007)
  11. A.I. Morozov “Development of the principles of a quasi-steady-state plasma accelerator with an intrinsic magnetic field with a power of 109-1011 W” Sov. Phys. Usp. 33 (7) 576–577 (1990)
  12. A.N. Ryabtsev “Spectroscopy of ions with the 5d electrons in the ground state” Phys. Usp. 42 285–286 (1999)
  13. L.I. Kiselevskii “Problems of Low-Temperature-Plasma Spectroscopy” Sov. Phys. Usp. 15 852–854 (1973)
  14. L.V. Dubovoi, A.G. Smirnov et al “The Use of Holography for Investigating Processes in a Thermonuclear Plasma and in a Moving Arc Discharge” Sov. Phys. Usp. 15 833–833 (1973)
  15. A.G. Sitenko “All-union conference on plasma theory” Sov. Phys. Usp. 15 356–364 (1972)
  16. A.A. Kolomenskii, M.S. Rabinovich, Ya.B. Fainberg “Collective Methods of Particle Acceleration in a Plasma and in Heavy-Current Electron Beams” Sov. Phys. Usp. 15 366–366 (1972)
  17. L.S. Bogdankevich, A.A. Rukhadze “Problems of Heavy-current Relativistic Electron Beams” Sov. Phys. Usp. 15 366–367 (1972)
  18. V.E. Golant “Ultrahigh-frequency Methods of Plasma Heating” Sov. Phys. Usp. 14 540–541 (1972)
  19. D.I. Iudin, S.S. Davydenko et al “Physics of lightning: new model approaches and prospects of the satellite observations” Phys. Usp. 61 766–778 (2018)
  20. N.A. Vinokurov, A.M. Barnyakov et al “Electron guns at the Budker Institute of Nuclear Physics SB RAS: prospects for the use of photocathodes with nanosecond and subpicosecond laser drivers” Phys. Usp. 60 1034–1038 (2017)

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