E.P. Snegirev



Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
Website:


Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)

See also: L.A. Dorokhin, A.N. Ryabtsev, R.R. Gayazov, Yu.V. Sidel’nikov, D.B. Abramenko, D.I. Astakhov, V.V. Medvedev, V.M. Krivtsun, K.N. Koshelev, M.S. Krivokorytov, P.S. Antsiferov, A.A. Yakushkin, A.A. Lash, D.A. Kim, I.P. Tsygvintsev

PACS: 52.77.-j, 52.70.-m, 52.59.-f, 52.25.Os, 42.82.Cr,

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