Anna Dmitrievna Solomyannaya



M.V. Keldysh Institute of Applied Mathematics, Russian Academy of Sciences
Address: Miusskaya pl. 4, Moscow, 125047, Russian Federation


Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)

See also: I.P. Tsygvintsev, I.Yu. Vichev, A.S. Grushin, D.A. Kim, K.N. Koshelev, A.N. Ryabtsev, A.A. Lash, A.A. Yakushkin, Yu.V. Sidel’nikov, R.R. Gayazov, V.V. Medvedev, B.V. Lakatosh, M.S. Krivokorytov, V.M. Krivtsun, O.F. Yakushev

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j,

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