Parallel fabrication of nanostructures via atom projection
Institute of Spectroscopy, Russian Academy of Sciences, ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
A scientific session of the Physical Sciences Division of the
Russian Academy of Sciences (RAS) was held in the
Conference Hall of the P N Lebedev Physical Institute, RAS
on 31 January 2007. The following reports were presented at
(1) Koshelev K N (Institute of Spectroscopy, RAS,
Troitsk, Moscow region), Banine V E (ASML, Veldhoven,
the Netherlands), Salashchenko N N (Institute for the Physics
of Microstructures, RAS, Nizhny Novgorod). ’Research and
development in short-wave radiation sources for new-genera-
(2) Balykin V I (Institute of Spectroscopy, RAS, Troitsk,
Moscow region). ’Parallel fabrication of nanostructures via
(3) Lozovik Yu E, Popov A M (Institute of Spectroscopy,
RAS, Troitsk, Moscow region). ’Properties and nanotechnological applications of nanotubes’.
An abridge version of the reports is given below.