Pavel Vital’evich Krainov



Moscow Institute of Physics and Technology (State University)
Address: Institutskii per. 9, Dolgoprudnyi, Moscow Region, 141700, Russian Federation
Fax: 7 (095) 485 4472
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Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)

See also: B.V. Lakatosh, D.B. Abramenko, P.S. Antsiferov, A.A. Yakushkin, O.F. Yakushev, I.P. Tsygvintsev, M.V. Spiridonov, A.D. Solomyannaya, E.P. Snegirev, Yu.V. Sidel’nikov, V.V. Medvedev, A.A. Lash, A.N. Ryabtsev, V.M. Krivtsun, A.S. Grushin

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j,

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