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Issue 7, 2024
Volume year page
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PACS numbers

42.82.Cr Fabrication techniques; lithography, pattern transfer
  1. D.B. Abramenko, P.S. Antsiferov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
    42.82.Cr, 52.25.Os, 52.59.−f, 52.70.−m, 52.77.−j (all)
  2. K.B. Fritzler, V.Ya. Prinz “3D printing methods for micro- and nanostructures” Phys. Usp. 62 54–69 (2019)
    32.80.Rm, 42.82.Cr, 61.46.−w, 68.65.−k, 81.20.−n (all)
  3. V.I. Balykin, A.N. Ryabtsev et al “On the 40th anniversary of the Institute of Spectroscopy of the Russian Academy of Sciences (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 8 October 2008)” Phys. Usp. 52 275–309 (2009)
    03.75.−b, 03.75.Hh, 05.30.Jp, 07.07.−a, 32.30.−r, 32.30.Jc, 33.20.−t, 36.40.−c, 37.20.+j, 42.82.Cr, 61.43.−j, 63.20.−e, 63.50.−x, 67.25.dw, 71.35.Lk, 71.36.+c, 78.30.−j, 78.47.−p, 78.55.−m, 81.07.−b, 87.85.fk, 87.64.−t, 95.30.Ky, 97.10.−q (all)
  4. A.N. Ryabtsev, S.S. Churilov “Spectroscopy of ionized atoms for astrophysics and nanotechnology” Phys. Usp. 52 282–286 (2009)
    32.30.−r, 32.30.Jc, 42.82.Cr, 95.30.Ky, 97.10.−q (all)
  5. K.N. Koshelev, V.E. Banine, N.N. Salashchenko “Research and development in short-wave radiation sources for new-generation lithography” Phys. Usp. 50 741–744 (2007)
    01.10.Fv, 42.72.−g, 42.82.Cr (all)
  6. G.N. Shkerdin “Problems of integrated optics” Sov. Phys. Usp. 30 549–550 (1987)
    01.30.Vv, 42.82.Et, 42.82.Cr, 42.82.Gw (all)
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