Vladimir Mikhailovich Krivtsun



Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
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Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)

See also: V.V. Medvedev, Yu.V. Sidel’nikov, P.S. Antsiferov, M.S. Krivokorytov, D.I. Astakhov, D.B. Abramenko, L.A. Dorokhin, E.P. Snegirev, K.N. Koshelev, A.N. Ryabtsev, R.R. Gayazov, A.S. Grushin, A.A. Lash, A.A. Yakushkin, I.P. Tsygvintsev

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j,

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