Vladimir Mikhailovich Krivtsun



Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
Website:


Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)

See also: D.B. Abramenko, A.N. Ryabtsev, D.I. Astakhov, P.S. Antsiferov, R.R. Gayazov, L.A. Dorokhin, V.V. Ivanov, K.N. Koshelev, M.S. Krivokorytov, E.P. Snegirev, Yu.V. Sidel’nikov, V.V. Medvedev, A.A. Yakushkin, O.F. Yakushev, I.P. Tsygvintsev

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j

© 1918–2020 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions