Maksim Vladimirovich Spiridonov



Prokhorov General Physics Institute of the Russian Academy of Sciences
Address: ul. Vavilova 38, Moscow, 119942, Russian Federation
Fax: 7 (495) 135 1330
Website:

Lebedev Physical Institute, Russian Academy of Sciences
Address: Leninsky prosp. 53, Moscow, 119991, Russian Federation
Phone: +7 (499) 135 42 64
Fax: +7 (499) 135 78 80
Website:


Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)

See also: O.F. Yakushev, D.B. Abramenko, V.M. Krivtsun, A.A. Yakushkin, I.P. Tsygvintsev, A.D. Solomyannaya, E.P. Snegirev, A.N. Ryabtsev, V.V. Medvedev, A.A. Lash, B.V. Lakatosh, Yu.V. Sidel’nikov, M.S. Krivokorytov, R.R. Gayazov, P.V. Krainov

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j,

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