Konstantin Nikolaevich Koshelev



Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
Website:


Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)
  2. K.N. Koshelev, V.E. Banine, N.N. Salashchenko “Research and development in short-wave radiation sources for new-generation lithography50 741–744 (2007)
  3. K.N. Koshelev, V.E. Banine, N.N. Salashchenko et alScientific session of the Physical Sciences Division of the Russian Academy of Sciences (31 January 2007)50 741–744 (2007)

See also: V.E. Banine, N.N. Salashchenko, D.B. Abramenko, E.P. Snegirev, A.N. Ryabtsev, V.V. Medvedev, V.M. Krivtsun, M.S. Krivokorytov, Yu.V. Sidel’nikov, V.V. Ivanov, L.A. Dorokhin, R.R. Gayazov, P.S. Antsiferov, D.I. Astakhov, O.F. Yakushev

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j, 42.72.-g,

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