Konstantin Nikolaevich Koshelev

Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
Website: www.isan.troitsk.ru

Articles

D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” 62 304–314 (2019)
K.N. Koshelev, V.E. Banine, N.N. Salashchenko “Research and development in short-wave radiation sources for new-generation lithography” 50 741–744 (2007)
K.N. Koshelev, V.E. Banine, N.N. Salashchenko et al “Scientific session of the Physical Sciences Division of the Russian Academy of Sciences (31 January 2007)” 50 741–744 (2007)

See also: N.N. Salashchenko, V.E. Banine, V.L. Ginzburg, Yu.E. Lozovik, A.N. Ryabtsev, D.B. Abramenko, V.M. Krivtsun, E.P. Snegirev, Yu.V. Sidel’nikov, V.V. Medvedev, P.S. Antsiferov, M.S. Krivokorytov, V.V. Ivanov, R.R. Gayazov, L.A. Dorokhin

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j, 01.10.Fv, 42.72.-g