P.S. Antsiferov

Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
Website: www.isan.troitsk.ru

Articles		Citations
1	D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)	25

P.S. Antsiferov: total citation number of the papers published in Phys. Usp.

See also: D.B. Abramenko, D.I. Astakhov, R.R. Gayazov, L.A. Dorokhin, V.V. Ivanov, K.N. Koshelev, M.S. Krivokorytov, V.M. Krivtsun, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.Yu. Vinokhodov, I.Yu. Vichev, A.S. Grushin

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j

P.S. Antsiferov

Articles

Citations