A.A. Yakushkin



EUV Labs, Ltd.
Address: Sirenevy bulvar 1, Troitsk, Moscow, 142191, Russian Federation


Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspection62 304–314 (2019)

See also: A.Yu. Vinokhodov, A.A. Lash, I.P. Tsygvintsev, R.R. Gayazov, I.Yu. Vichev, D.A. Kim, Yu.V. Sidel’nikov, V.V. Medvedev, A.N. Ryabtsev, B.V. Lakatosh, K.N. Koshelev, A.D. Solomyannaya, M.S. Krivokorytov, P.S. Antsiferov, O.F. Yakushev

PACS: 52.77.-j, 52.70.-m, 52.59.-f, 52.25.Os, 42.82.Cr

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