A.A. Yakushkin



EUV Labs, Ltd.
Publication years: 2019
Address: Sirenevy bulvar 1, Troitsk, Moscow, 142191, Russian Federation


Articles

Citations

1 D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019) 27

27
A.A. Yakushkin: total citation number of the papers published in Phys. Usp.

See also: A.Yu. Vinokhodov, A.A. Lash, D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j

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