Author Index / 2019 / March
A
Abramenko D.B.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Antsiferov P.S.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Aseev S.A.
Astakhov D.I.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
B
C
D
Dianov E.M.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Dormidonov A.E.
Dorokhin L.A.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
E
G
Garnov S.V.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Gayazov R.R.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Grushin A.S.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
I
Ivanov V.V.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
K
Kagan M.Yu.
Kandidov V.P.
Khomich V.Yu.
Kim D.A.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Kompanets V.O.
Konov V.I.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Koshelev K.N.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Krainov P.V.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Krivokorytov M.S.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Krivtsun V.M.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
L
Lakatosh B.V.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Lash A.A.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
M
Makarov A.A.
Medvedev V.V.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Melentiev P.N.
N
O
Osiko V.V.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
P
Pashinin P.P.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Pendry J.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Pitaevskii L.P.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Popova M.N.
R
Rubakov V.A.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Rudenko O.V.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Ryabov E.A.
Ryabtsev A.N.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
S
Shcherbakov I.A.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Shmakov V.A.
Sidel’nikov Yu.V.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Smith D.R.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Snegirev E.P.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Solomyannaya A.D.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Spiridonov M.V.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
T
Tretyakov S.
- S.V. Garnov, E.M. Dianov, V.I. Konov, V.V. Osiko, P.P. Pashinin, J. Pendry, L.P. Pitaevskii, V.A. Rubakov, O.V. Rudenko, D.R. Smith, S. Tretyakov, I.A. Shcherbakov “In memory of Viktor Georgievich Veselago” Phys. Usp. 62 315–316 (2019)
Tsygvintsev I.P.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Turlapov A.V.
V
Vichev I.Yu.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Vinokhodov A.Yu.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Y
Yakushev O.F.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
Yakushkin A.A.
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov, A.Yu. Vinokhodov, I.Yu. Vichev, R.R. Gayazov, A.S. Grushin, L.A. Dorokhin, V.V. Ivanov, D.A. Kim, K.N. Koshelev, P.V. Krainov, M.S. Krivokorytov, V.M. Krivtsun, B.V. Lakatosh, A.A. Lash, V.V. Medvedev, A.N. Ryabtsev, Yu.V. Sidel’nikov, E.P. Snegirev, A.D. Solomyannaya, M.V. Spiridonov, I.P. Tsygvintsev, O.F. Yakushev, A.A. Yakushkin “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
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