R.R. Gayazov
Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
Website:
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Articles
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
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See also:
D.B. Abramenko,
K.N. Koshelev,
P.S. Antsiferov,
E.P. Snegirev,
Yu.V. Sidel’nikov,
V.V. Medvedev,
V.M. Krivtsun,
M.S. Krivokorytov,
A.N. Ryabtsev,
V.V. Ivanov,
L.A. Dorokhin,
D.I. Astakhov,
D.A. Kim,
A.D. Solomyannaya,
A.A. Yakushkin
PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j
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