B.V. Lakatosh
Moscow Institute of Physics and Technology (National Research University)
Address: Institutskii per. 9, Dolgoprudny, Moscow Region, 141701, Russian Federation
Phone: +7 (495) 408-45-54
Fax: +7 (495) 408-42-54
Website:
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Articles
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
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See also:
P.V. Krainov,
D.B. Abramenko,
V.M. Krivtsun,
O.F. Yakushev,
I.P. Tsygvintsev,
M.V. Spiridonov,
A.D. Solomyannaya,
E.P. Snegirev,
Yu.V. Sidel’nikov,
A.N. Ryabtsev,
V.V. Medvedev,
A.A. Lash,
M.S. Krivokorytov,
P.S. Antsiferov,
K.N. Koshelev
PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j
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