B.V. Lakatosh



Moscow Institute of Physics and Technology (National Research University)
Address: Institutskii per. 9, Dolgoprudny, Moscow Region, 141701, Russian Federation
Phone: +7 (495) 408-45-54
Fax: +7 (495) 408-42-54
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Articles

  1. D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspectionPhys. Usp. 62 304–314 (2019)

See also: P.V. Krainov, D.B. Abramenko, V.M. Krivtsun, O.F. Yakushev, I.P. Tsygvintsev, M.V. Spiridonov, A.D. Solomyannaya, E.P. Snegirev, Yu.V. Sidel’nikov, A.N. Ryabtsev, V.V. Medvedev, A.A. Lash, M.S. Krivokorytov, P.S. Antsiferov, K.N. Koshelev

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j

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