Il’ya Yur’evich Vichev
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M.V. Keldysh Institute of Applied Mathematics, Russian Academy of Sciences
Address: Miusskaya pl. 4, Moscow, 125047, Russian Federation
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Articles
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
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See also:
I.P. Tsygvintsev,
A.S. Grushin,
A.D. Solomyannaya,
D.A. Kim,
A.A. Lash,
P.S. Antsiferov,
A.A. Yakushkin,
O.F. Yakushev,
M.V. Spiridonov,
E.P. Snegirev,
Yu.V. Sidel’nikov,
A.N. Ryabtsev,
V.V. Medvedev,
D.B. Abramenko,
B.V. Lakatosh
PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j
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