Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands

M.M. Barysheva, A.E. Pestov, N.N. Salashchenko, M.N. Toropov, N.I. Chkhalo
Institute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul'yanova 46, Nizhnii Novgorod, 603950, Russian Federation

Optical methods that provide high diffraction image quality with a spatial resolution of several to tens of nanometers and are in demand in such areas as projection lithography, X-ray microscopy, astrophysics, and fundamental research on the interaction of matter (vacuum) with ultrahigh (10²⁰ — 10²³ W cm⁻²) electromagnetic fields are reviewed in terms of fabrication and testing technologies and possible use in the 2 — 60 nm wavelength range. The current worldwide status of and recent achievements by the Institute for Physics of Microstructures of the Russian Academy of Sciences (RAS) in the field are discussed.

PACS: 41.50.+h, 42.79.−e, 95.55.Ka (all)
DOI: 10.3367/UFNe.0182.201207c.0727
URL: https://ufn.ru/en/articles/2012/7/c/
Web of Science

000309960400003
Scopus

2-s2.0-84867566149
Citation: Barysheva M M, Pestov A E, Salashchenko N N, Toropov M N, Chkhalo N I "Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands" Phys. Usp. 55 681–699 (2012)

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Received: 27th, June 2011, accepted: 17th, August 2011

Оригинал: Барышева М М, Пестов А Е, Салащенко Н Н, Торопов М Н, Чхало Н И «Прецизионная изображающая многослойная оптика для мягкого рентгеновского и экстремального ультрафиолетового диапазонов» УФН 182 727–747 (2012); DOI: 10.3367/UFNr.0182.201207c.0727

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