Instruments and methods of investigation

Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands

, , , ,
Institute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul'yanova 46, Nizhnii Novgorod, 603950, Russian Federation

Optical methods that provide high diffraction image quality with a spatial resolution of several to tens of nanometers and are in demand in such areas as projection lithography, X-ray microscopy, astrophysics, and fundamental research on the interaction of matter (vacuum) with ultrahigh (1020 — 1023 W cm−2) electromagnetic fields are reviewed in terms of fabrication and testing technologies and possible use in the 2 — 60 nm wavelength range. The current worldwide status of and recent achievements by the Institute for Physics of Microstructures of the Russian Academy of Sciences (RAS) in the field are discussed.

Fulltext is available at IOP
PACS: 41.50.+h, 42.79.−e, 95.55.Ka (all)
DOI: 10.3367/UFNe.0182.201207c.0727
Citation: Barysheva M M, Pestov A E, Salashchenko N N, Toropov M N, Chkhalo N I "Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands" Phys. Usp. 55 681–699 (2012)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 27th, June 2011, 17th, August 2011

Оригинал: Барышева М М, Пестов А Е, Салащенко Н Н, Торопов М Н, Чхало Н И «Прецизионная изображающая многослойная оптика для мягкого рентгеновского и экстремального ультрафиолетового диапазонов» УФН 182 727–747 (2012); DOI: 10.3367/UFNr.0182.201207c.0727

References (126) Cited by (41) Similar articles (16) ↓

  1. A.S. Pirozhkov, E.N. Ragozin “Aperiodic multilayer structures in soft X-ray optics58 1095–1105 (2015)
  2. V.V. Lider “X-ray microscopy60 187–203 (2017)
  3. V.V. Lider “X-ray fluorescence imaging61 980–999 (2018)
  4. A.S. Bugaev, P.A. Eroshkin et alLow-power X-ray tubes: the current status56 691–703 (2013)
  5. I.B. Borovskii, R.V. Vedrinskii et alEXAFS spectroscopy: a new method for structural investigation29 539–569 (1986)
  6. V.V. Lider “X-ray crystal interferometers57 1099–1117 (2014)
  7. V.Yu. Khomich, V.A. Shmakov “Large-sized mirrors for power optics62 249–256 (2019)
  8. V.A. Belyakov, V.E. Dmitrienko “Polarization phenomena in x-ray optics32 697–719 (1989)
  9. E.N. Ragozin, E.A. Vishnyakov et alSoft X-ray spectrometers based on aperiodic reflection gratings and their application”, accepted
  10. I.S. Osad’ko “The near-field microscope as a tool for studying nanoparticles53 77–81 (2010)
  11. V.A. Arkad’ev, A.I. Kolomiitsev et alWide-band x-ray optics with a large angular aperture32 271–276 (1989)
  12. A.D. Pogrebnjak, A.G. Ponomarev et alApplication of micro- and nanoprobes to the analysis of small-sized 3D materials, nanosystems, and nanoobjects55 270–300 (2012)
  13. A.B. Medvedev, R.F. Trunin “Shock compression of porous metals and silicates55 773–789 (2012)
  14. A.E. Dubinov, L.A. Mytareva “Invisible cloaking of material bodies using the wave flow method53 455–479 (2010)
  15. A.A. Kaminskii, Bohaty L et alNew nonlinear laser effects in α-quartz: generation of a two-octave Stokes and anti-Stokes comb and cascaded lasing in the spectral range of the second and third harmonics51 899–909 (2008)
  16. A.K. Rebrov “Possibilities of gas phase synthesis of diamond structures from mixtures of hydrogen and hydrocarbons60 179–186 (2017)

The list is formed automatically.

© 1918–2020 Uspekhi Fizicheskikh Nauk
Email: Editorial office contacts About the journal Terms and conditions