RSS feeds
РусскийEnglish
Issue 11, 2024
Volume year page
Issues Authors PACS Subscription For authors

Issues

 / 

2012

 / 

July

←  →

Instruments and methods of investigation


Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands

, , , ,
Institute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul'yanova 46, Nizhnii Novgorod, 603950, Russian Federation

Optical methods that provide high diffraction image quality with a spatial resolution of several to tens of nanometers and are in demand in such areas as projection lithography, X-ray microscopy, astrophysics, and fundamental research on the interaction of matter (vacuum) with ultrahigh (1020 — 1023 W cm−2) electromagnetic fields are reviewed in terms of fabrication and testing technologies and possible use in the 2 — 60 nm wavelength range. The current worldwide status of and recent achievements by the Institute for Physics of Microstructures of the Russian Academy of Sciences (RAS) in the field are discussed.

Fulltext pdf (2.2 MB)
Fulltext is also available at DOI: 10.3367/UFNe.0182.201207c.0727
PACS: 41.50.+h, 42.79.−e, 95.55.Ka (all)
DOI: 10.3367/UFNe.0182.201207c.0727
URL: https://ufn.ru/en/articles/2012/7/c/
000309960400003
2-s2.0-84867566149
Citation: Barysheva M M, Pestov A E, Salashchenko N N, Toropov M N, Chkhalo N I "Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands" Phys. Usp. 55 681–699 (2012)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 27th, June 2011, 17th, August 2011

Оригинал: Барышева М М, Пестов А Е, Салащенко Н Н, Торопов М Н, Чхало Н И «Прецизионная изображающая многослойная оптика для мягкого рентгеновского и экстремального ультрафиолетового диапазонов» УФН 182 727–747 (2012); DOI: 10.3367/UFNr.0182.201207c.0727

References (126) Cited by (55) ↓ Similar articles (20)

  1. Guseva V E, Mikhailenko M S i dr Pribory I Tehnika èksperimenta (1) 77 (2024)
  2. Guseva V E, Mikhailenko M S et al Instrum Exp Tech 67 67 (2024)
  3. Lider V V Opt. Spectrosc. 131 1016 (2023)
  4. Guseva V E, Nechay A N et al Opt. Spectrosc. 131 391 (2023)
  5. Mazuritskiy M I, Kozakov A T et al Surfaces And Interfaces 33 102258 (2022)
  6. Polkovnikov V N, Shaposhnikov R A et al Opt. Express 30 19332 (2022)
  7. Toropov M, Chkhalo N et al Opt. Lett. 47 3459 (2022)
  8. Khokhlov V A, Ashitkov S I et al J. Phys.: Conf. Ser. 1787 012022 (2021)
  9. Romashevskiy S A, Khokhlov V A et al Jetp Lett. 113 308 (2021)
  10. Nechay A N, Perekalov A A et al Opt. Spectrosc. 129 185 (2021)
  11. Kuzin S V, Reva A A et al Tech. Phys. 65 1736 (2020)
  12. Chkhalo N I, Malyshev I V et al Phys.-Usp. 63 67 (2020)
  13. Wang Ch, Zhang T, Wang W Applied Sciences 10 4621 (2020)
  14. Polkovnikov V N, Salashchenko N N et al Phys.-Usp. 63 83 (2020)
  15. Sáenz-Trevizo A, Hodge A M Nanotechnology 31 292002 (2020)
  16. Lider V V Uspekhi Fizicheskikh Nauk 189 1137 (2019) [Lider V V Phys.-Usp. 62 1063 (2019)]
  17. Garakhin S A, Polkovnikov V N, Chkhalo N I J. Synch. Investig. 13 173 (2019)
  18. Mikhaylenko M S, Pestov A E et al J. Synch. Investig. 13 182 (2019)
  19. Chkhalo N I, Salashchenko N N Bull. Russ. Acad. Sci. Phys. 83 105 (2019)
  20. Akhsakhalyan A A, Gavrilin D A et al Tech. Phys. 64 1698 (2019)
  21. Qi R, Huang Q et al Materials 12 2936 (2019)
  22. Akhsakhalyan A A, Vainer Yu A et al J. Synch. Investig. 13 1 (2019)
  23. Ivanova E P Opt. Spectrosc. 127 69 (2019)
  24. Barysheva M M, Chkhalo N I et al XST 27 857 (2019)
  25. Nechay A N, Perekalov A A et al J. Synch. Investig. 13 862 (2019)
  26. Drozdov M N, Drozdov Y N et al Thin Solid Films 661 65 (2018)
  27. Chkhalo N I, Kirsanov A V et al Appl. Opt. 57 6911 (2018)
  28. Chkhalo N I, Malyshev I V et al J. Astron. Telesc. Instrum. Syst. 4 1 (2018)
  29. Vishnyakov E A, Kopylets I A et al Unconventional Optical Imaging, (2018) p. 94
  30. Goponov Yu A, Shatokhin R A et al Nuclear Instruments And Methods In Physics Research Section A: Accelerators, Spectrometers, Detectors And Associated Equipment 885 134 (2018)
  31. (EUV and X-ray Optics: Synergy between Laboratory and Space V) Vol. EUV and X-ray Optics: Synergy between Laboratory and Space V High-aperture monochromator-reflectometer and its usefulness for CCD calibration RenéHudecLadislavPinaEugene A.VishnyakovAlexander V.ShcherbakovAndrei A.PertsovVladimir N.PolkovnikovAlexey E.PestovDmitry E.ParievNikolai I.Chkhalo10235 (2017) p. 102350W
  32. Malyshev I V, Chkhalo N I et al Journal Of Modern Optics 64 413 (2017)
  33. Huang Q, Medvedev V et al 4 (1) (2017)
  34. Garbaruk A V, Gritskevich M S et al J. Phys. D: Appl. Phys. 50 025201 (2017)
  35. Akhsakhalyan A D, Kluenkov E B et al J. Synch. Investig. 11 1 (2017)
  36. Chkhalo N I, Mikhailenko M S et al Surface And Coatings Technology 311 351 (2017)
  37. Chkhalo N I, Kaskov I A et al Precision Engineering 48 338 (2017)
  38. Huang Q, Fei J et al Opt. Lett. 41 701 (2016)
  39. Chkhalo N I, Malyshev I V et al Appl. Opt. 55 619 (2016)
  40. Chkhalo N I, Churin S A et al Appl. Opt. 55 1249 (2016)
  41. Bogachev S A, Chkhalo N I et al Appl. Opt. 55 2126 (2016)
  42. Brychikhin M N, Chkhalo N I et al Appl. Opt. 55 4430 (2016)
  43. (Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray) Vol. Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray Spectral calibration of CCDs and multilayer filters intended for future space applications Jan-Willem A.den HerderTadayukiTakahashiMarshallBautzEugene A.VishnyakovAlexey S.KirichenkoAnton A.RevaArtem A.RizvanovJurii A.PlastininSergei V.Kuzin9905 (2016) p. 99053B
  44. Dogadin V O, Zuev S Yu et al J. Synch. Investig. 9 726 (2015)
  45. Chkhalo N I, Pestov A E et al 86 (6) (2015)
  46. Akhsakhalyan A A, Akhsakhalyan A D et al J. Synch. Investig. 9 771 (2015)
  47. Pirozhkov A S, Ragozin E N Uspekhi Fizicheskikh Nauk 185 1203 (2015) [Pirozhkov A S, Ragozin E N Phys.-Usp. 58 1095 (2015)]
  48. Shevelev M, Konkov A, Aryshev A Phys. Rev. A 92 (5) (2015)
  49. Drozdov M N, Drozdov Y N et al Thin Solid Films 577 11 (2015)
  50. Akhsakhalyan A A, Akhsakhalyan A D et al J. Synch. Investig. 9 741 (2015)
  51. Vainer Yu A, Zorina M V et al Bull. Russ. Acad. Sci. Phys. 78 57 (2014)
  52. Chkhalo N I, Churin S A et al Opt. Express 22 20094 (2014)
  53. Zabrodskii V V, Zadiranov Yu M et al Tech. Phys. Lett. 40 648 (2014)
  54. Vishnyakov E A, Voronov D L et al Quantum Electron. 43 666 (2013)
  55. Barysheva M M, Vainer Yu A et al Tech. Phys. 58 1371 (2013)
© 1918–2024 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions