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Instruments and methods of investigation


Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands

, , , ,
Institute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul'yanova 46, Nizhnii Novgorod, 603950, Russian Federation

Optical methods that provide high diffraction image quality with a spatial resolution of several to tens of nanometers and are in demand in such areas as projection lithography, X-ray microscopy, astrophysics, and fundamental research on the interaction of matter (vacuum) with ultrahigh (1020 — 1023 W cm−2) electromagnetic fields are reviewed in terms of fabrication and testing technologies and possible use in the 2 — 60 nm wavelength range. The current worldwide status of and recent achievements by the Institute for Physics of Microstructures of the Russian Academy of Sciences (RAS) in the field are discussed.

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Fulltext is also available at DOI: 10.3367/UFNe.0182.201207c.0727
PACS: 41.50.+h, 42.79.−e, 95.55.Ka (all)
DOI: 10.3367/UFNe.0182.201207c.0727
URL: https://ufn.ru/en/articles/2012/7/c/
000309960400003
2-s2.0-84867566149
Citation: Barysheva M M, Pestov A E, Salashchenko N N, Toropov M N, Chkhalo N I "Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands" Phys. Usp. 55 681–699 (2012)
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Received: 27th, June 2011, 17th, August 2011

Оригинал: Барышева М М, Пестов А Е, Салащенко Н Н, Торопов М Н, Чхало Н И «Прецизионная изображающая многослойная оптика для мягкого рентгеновского и экстремального ультрафиолетового диапазонов» УФН 182 727–747 (2012); DOI: 10.3367/UFNr.0182.201207c.0727

References (126) ↓ Cited by (53) Similar articles (20)

  1. Moore G E Electronics 38 114 (1965); Moore G E Proc. IEEE 86 82 (1998), reprinted
  2. Rosa L G, Liang J J. Phys. Condens. Matter 21 483001 (2009)
  3. Pease R F Microelectron. Eng. 78 - 79 381 (2005); Pease R F "Charged particle maskless lithography" 30th Intern. Conf. on Micro & Nano Engineering, 2004
  4. Hirayanagi N et al. Proc. SPIE 5037 504 (2003)
  5. Giannuzzi L A, Stevie F A (Eds) Introduction To Focused Ion Beams. Instrumentation, Theory, Techniques, And Practice (New York: Springer, 2005)
  6. Ginger D S, Zhang H, Mirkin C A Angew. Chem. Int. Ed. 43 30 (2003)
  7. Wong A K-K Resolution Enhancement Techniques In Optical Lithography (Bellingham, Wash.: SPIE Press, 2001)
  8. Drapeau M et al. Proc. SPIE 6521 652109 (2007)
  9. ASML, http://www.asml.com/asml/show.do?ctx=6720&rid=36951
  10. Haran B et al. IEEE Electron Dev. Meeting Proc. 625 (2008)
  11. Pohl D W, Denk W, Lanz M Appl. Phys. Lett. 44 651 (1984)
  12. Naulleau P et al. J.Vac. Sci. Technol. B 20 2829 (2002)
  13. Van Dijsseldonk A "Concept of ASML EUV tool — lithographic aspects" ’NanoCMOS (Pull-Nano)’/’More Moore’ Event "Beyond 45nm Technologies", Belgium, IMEC, 9—10 May 2006
  14. Salashchenko N N, Chkhalo N I Vestnik RAN 78 450 (2008); Salashchenko N N, Chkhalo N I Herald Russ. Acad. Sci. 78 279 (2008)
  15. Wagner Ch, Harned N Nature Photon. 4 24 (2010)
  16. Dmitrienko V E, Ovchinnikova E N Kristallogr. 48 (Suppl. 1) 59 (2003); Dmitrienko V E, Ovchinnikova E N Crystallogr. Rep. 48 (Suppl. 1) S52 (2003)
  17. Basov N G i dr. Diagnostika Plotnoi Plazmy (Pod red. N G Basova) (M.: Nauka, 1989)
  18. Mandel’shtam S L i dr. "Izmereniya pri pomoshchi geofizicheskikh raket" Iskusstvennye Sputniki Zemli Vyp. 10 Issledovanie Rentgenovskogo Izlucheniya Solntsa (M.: Izd-vo AN SSSR, 1961) p. 12
  19. Kirz J, Jacobsen C, Howells M Quart. Rev. Biophys. 28 33 (1995)
  20. Fischer P Mater. Today 13 (9) 14 (2010)
  21. Oreshko A P, Dmitrienko V E, Ovchinnikova E N Fundament. Priklad. Mat. 15 (6) 151 (2009); Oreshko A P, Dmitrienko V E, Ovchinnikova E N J. Math. Sci. 172 859 (2009)
  22. Kulipanov G N, Skrinskii A N Usp. Fiz. Nauk 122 369 (1977); Kulipanov G N, Skrinskii A N Sov. Phys. Usp. 20 559 (1977)
  23. Saldin E L, Schneidmiller E A, Yurkov M V The Physics Of Free Electron Lasers (Berlin: Springer, 2000)
  24. Koshelev K N, Banin V E, Salashchenko N N Usp. Fiz. Nauk 177 777 (2007); Koshelev K N, Banine V E, Salashchenko N N Phys. Usp. 50 741 (2007)
  25. Hansson B A M Microelectron. Eng. 53 667 (2000)
  26. Attwood D, Halbach K, Kim K-J Science 228 1265 (1985)
  27. Lee T N, McLean E A, Elton R C Phys. Rev. Lett. 59 1185 (1987)
  28. Andreev S S Izv. RAN. Ser. Fiz. 69 207 (2005)
  29. Andreev S S et al. Nucl. Instrum. Meth. Phys. Res. A 543 340 (2005)
  30. Henke B L, Gullikson E M, Davis J C Atom. Data Nucl. Data Tabl. 54 181 (1993)
  31. The Center for X-Ray Optics, "X-Ray interactions with matter" http://henke.lbl.gov/optical_constants/
  32. Vinogradov A V i dr. Zerkal’naya Rentgenovskaya Optika (Pod obshch. red. A V Vinogradova) (L.: Mashinostroenie, 1989)
  33. Kirkpatrick P, Baez A V J. Opt. Soc. Am. 38 766 (1948)
  34. Wolter H Ann. Physik 10 94 (1952)
  35. Mimura H et al. Appl. Phys. Lett. 90 051903 (2007)
  36. Arkad’ev V A, Kumakhov M A Poverkhnost’. Fizika, Khimiya, Mekhanika (10) 25 (1986)
  37. Jark W et al. Appl. Phys. Lett. 78 1192 (2001)
  38. Snigirev A et al. Nature 384 49 (1996)
  39. Schmahl G, Rudolph D (Eds) X-ray Microscopy (Berlin: Springer-Verlag, 1984); Shmal’ G, Rudol’f D (Red.) Rentgenovskaya Optika i Mikroskopiya (M.: Mir, 1987)
  40. Chao W et al. Nature 435 1210 (2005)
  41. Weiss D, Peuker M, Schneider G Appl. Phys. Lett. 72 1805 (1998)
  42. Schneider G, Rehbein S, Werner S Modern Developments In X-Ray And Neutron Optics (Eds A Erko et al.) (New York: Springer Science + Business Media, 2008) p. 137
  43. Rehbein S et al. Phys. Rev. Lett. 103 110801 (2009)
  44. Spiller E AIP Conf. Proc. 75 124 (1981)
  45. Barbee T W Opt. Eng. 25 898 (1986)
  46. Andreev S S et al. Centr. Eur. J. Phys. 1 191 (2003)
  47. Gaponov S V et al. Opt. Commun. 38 7 (1981)
  48. Platonov Yu Y, Gomez L, Broadway D Proc. SPIE 4782 152 (2002)
  49. Andreev S S et al. J. Synchrotron Rad. 10 358 (2003)
  50. Vainer Yu A i dr. Zh. Eksp. Teor. Fiz. 130 401 (2006); Vainer Yu A et al. JETP 103 346 (2006)
  51. Shamov E A, Prokhorov K A, Salashchenko N N Poverkhnost’. Rentgen., Sinkhrotron. Neitronnye Issled. (9) 60 (1996)
  52. Salashchenko N N, Shamov E A Opt. Commun. 134 7 (1997)
  53. Sakano K, Yamamoto M Proc. SPIE 3767 238 (1999)
  54. Kuhlmann T et al. Appl. Opt. 41 2048 (2002)
  55. Gullikson E M Intern. Conf. on Physics of X-Ray Multilayer Structures, PXRMS’06, Sapporo, Japan, March 12 - 16, 2006; Gullikson E M http://www.esrf.eu/files/Conferences/pxrms06/booklet.pdf
  56. Schäfers F et al. Appl. Opt. 38 4074 (1999)
  57. Gaponov S V i dr. Zh. Tekh. Fiz. 56 708 (1986)
  58. Andreev A V, Michette A G, Renwick A J. Mod. Opt. 35 1667 (1988)
  59. Holý V et al. Phys. Rev. B 47 15896 (1993)
  60. Schmahl G, Rudolph D (Eds) X-ray Microscopy (Berlin: Springer-Verlag, 1984); Shmal’ G, Rudol’f D (Red.) Rentgenovskaya Optika i Mikroskopiya (M.: Mir, 1987) p. 305
  61. Chkhalo N I et al. X-Ray Microscopy IV. XRM’93. Proc. of the 4th Intern. Conf., Chernogolovka, Russia, Sept. 20 - 24, 1993 (Eds V V Aristov, A I Erko) (Chernogolovka: Bogorodskii Pechatnik, 1994) p. 586
  62. Vainer Yu A i dr. Izv. RAN. Ser. Fiz. 75 65 (2011); Vainer Yu A et al. Bull. Russ. Acad. Sci. Phys. 75 61 (2011)
  63. Stearns D G J. Appl. Phys. 65 491 (1989)
  64. Savage D E et al. J. Appl. Phys. 69 1411 (1991)
  65. Renner O et al. Rev. Sci. Instrum. 63 1478 (1992)
  66. Andreev A V i dr. Pis’ma ZhETF 66 219 (1997); Andreev A V et al. JETP Lett. 66 236 (1997)
  67. Akhsakhalyan A D et al. Thin Solid Films 203 317 (1991)
  68. Andreev S S et al. Nucl. Instrum. Meth. Phys. Res. A 603 80 (2009)
  69. Andreev S S i dr. Zh. Tekh. Fiz. 80 (8) 93 (2010); Andreev S S et al. Tech. Phys. 55 1168 (2010)
  70. Parratt L G Phys. Rev. 95 359 (1954)
  71. Michaelsen S et al. Opt. Lett. 26 792 (2001)
  72. Zuev S Yu i dr. Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (1) 32 (2002)
  73. André J-M et al. X-Ray Spectrometry 34 203 (2005)
  74. Malacara D (Ed.) Optical Shop Testing 2nd ed. (New York: Wiley, 1992)
  75. Zygo Corporation, http://www.zygo.com
  76. Salashchenko N N, Toropov M N, Chkhalo N I Izv. RAN. Ser. Fiz. 74 62 (2010); Salashchenko N N, Toporov M N, Chkhalo N I Bull. Russ. Acad. Sci. 74 53 (2010)
  77. Chkhalo N I et al. Lithography (Ed. M Wang) (Vukovar, Croatia: INTECH, 2010) p. 656; Chkhalo N I et al. http://sciyo.com/articles/show/title/manufacturing-and-investigating-objective-lens-for-ultrahigh-resolution-lithography-facilities
  78. Barysheva M M i dr. Izv. RAN. Ser. Fiz. 75 71 (2011); BaryshevaM M et al. Bull. Russ. Acad. Sci. Phys. 75 67 (2011)
  79. Linnik V P Izv. AN SSSR 1 210 (1933); Linnik V P C.R. Acad. Sci. USSR 1 208 (1933)
  80. Sommargren G E Laser Focus World 32 (8) 61 (1996)
  81. Naulleau P P et al. Appl. Opt. 38 7252 (1999)
  82. Otaki K et al. J. Vac. Sci. Technol. B 20 2449 (2002)
  83. Chkhalo N I et al. Proc. SPIE 7025 702507 (2008)
  84. Chkhalo N I et al. Rev. Sci. Instrum. 79 033107 (2008)
  85. Klyuenkov E B i dr. Rossiiskie Nanotekhnologii 3 (9 - 10) 116 (2008); Kluyenkov E B et al. Nanotechnol. Russ. 3 602 (2008)
  86. Puryaev D T Metody Kontrolya Opticheskikh Asfericheskikh Poverkhnostei (M.: Mashinostroenie, 1976) p. 13
  87. Kurashima Y et al. Microelectron. Eng. 85 1193 (2008)
  88. Keller A, Facsko S, Möller W J. Phys. Condens. Matter 21 495305 (2009)
  89. Ziegler E Nucl. Instrum. Meth. Phys. Res. A 616 188 (2010)
  90. Chkhalo N I et al. Nucl. Instrum. Meth. Phys. Res. A 359 155 (1995)
  91. Zuev S Yu i dr. Izv. RAN. Ser. Fiz. 75 57 (2011); Zuev S Yu et al. Bull. Russ. Acad. Sci. Phys. 75 53 (2011)
  92. Barysheva M M Nanofizika i nanoelektronika. Trudy XV mezhdunarodnogo simpoziuma, 14 - 18 marta 2011 g., Nizhnii Novgorod T. 1 Vol. 1 (N. Novgorod: IFM RAN, 2011) p. 85
  93. Dinger U et al. Proc. SPIE 4146 35 (2000)
  94. Andreev S S i dr. Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (2) 45 (2005)
  95. Zuev S Yu i dr. Izv. RAN. Ser. Fiz. 75 61 (2011); Zuev S Yu et al. Bull. Russ. Acad. Sci. Phys. 75 57 (2011)
  96. Wood O et al. Proc. SPIE 7271 727104 (2009)
  97. Tawarayama K et al. Jpn. J. Appl. Phys. 48 06FA02 (2009)
  98. Gower M "`Photolithography microsteppers" http://www.electroiq.com/articles/mlw/print/volume-13/issue-1/featured/photolithography-microsteppers.html
  99. Volgunov D G i dr. Izv. RAN. Ser. Fiz. 75 54 (2011); Volgunov D G et al. Bull. Russ. Acad. Sci. Phys. 75 49 (2011)
  100. Zuev S Yu i dr. Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (6) 10 (2011); Zuev S Yu et al. J. Surf. Investigat. X-Ray Synchr. Neutron Tech. 5 517 (2011)
  101. Tsarfati T et al. Thin Solid Films 518 1365 (2009)
  102. Artyukov I A i dr. Kvantovaya Elektronika 34 691 (2004); Artyukov I A et al. Quantum Electron. 34 691 (2004)
  103. Niemann B, Rudolph D, Schmahl G Appl. Opt. 15 1883 (1976)
  104. Parkinson D Y et al. J. Struct. Biol. 162 380 (2008)
  105. Hoover R B et al. Proc. SPIE 984 234 (1988)
  106. Lovas I et al. Proc. SPIE 316 90 (1981)
  107. Tanaka K A et al. Proc. SPIE 1140 502 (1989)
  108. Artyukov I A i dr. Kvantovaya Elektronika 22 951 (1995); Artyukov I A et al. Quantum Electron. 25 919 (1995)
  109. Kozhevnikov I V, Bukreeva I N, Ziegler E Nucl. Instrum. Meth. Phys. Res. A 460 424 (2001)
  110. Salashchenko N N, Platonov Yu Ya, Zuev S Yu Nucl. Instrum. Meth. Phys. Res. A 359 114 (1995)
  111. Kuzin S V, Bogachev S A Voprosy Elektromekhaniki. Trudy NPP VNIIEM 111 (4) 51 (2009)
  112. Urnov A M i dr. Pis’ma Astron. Zhurn. 33 446 (2007); Urnov A M et al. Astron. Lett. 33 396 (2007)
  113. Zhitnik I A i dr. Trudy FIAN 195 3 (1989)
  114. Shestov S V i dr. Pis’ma Astron. Zhurn. 36 46 (2010); Shestov S V et al. Astron. Lett. 36 44 (2010)
  115. Kuzin S V i dr. Izv. RAN. Ser. Fiz. 75 91 (2011); Kuzin S V et al. Bull. Russ. Acad. Sci. Phys. 75 87 (2011)
  116. Bibishkin M S et al. Proc. SPIE 7025 702502 (2008)
  117. Volodin B A i dr. Izv. RAN. Ser. Fiz. 74 53 (2010); Volodin B A et al. Bull. Russ. Acad. Sci. Phys. 74 46 (2010)
  118. Ditmire T et al. Nature 386 54 (1997)
  119. Makarov G N Usp. Fiz. Nauk 179 487 (2009); Makarov G N Phys. Usp. 52 461 (2009)
  120. Saldin E Report FEEL09 (2009)
  121. Anchutkin V S i dr. Nanofizika i nanoelektronika. Trudy XIV mezhdunarodnogo simpoziuma, 15 - 19 marta 2010 g., Nizhnii Novgorod Vol. 1 (N. Novgorod: IFM RAN, 2010) p. 209
  122. Bibishkin M S Izv. RAN. Ser. Fiz. 69 199 (2005)
  123. Artyukov I A et al. Proc. SPIE 5919 94 (2005)
  124. Montcalm C et al. Proc. SPIE 3331 42 (1998)
  125. Bajt S et al. Proc. SPIE 4506 65 (2001)
  126. Zuev S Yu i dr. Izvestiya RAN. Ser. Fiz. 74 58 (2010); Zuev S Yu et al. Bull. Russ. Acad. Sci. Phys. 74 50 (2010)
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