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Instruments and methods of investigation


Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands

, , , ,
Institute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul'yanova 46, Nizhnii Novgorod, 603950, Russian Federation

Optical methods that provide high diffraction image quality with a spatial resolution of several to tens of nanometers and are in demand in such areas as projection lithography, X-ray microscopy, astrophysics, and fundamental research on the interaction of matter (vacuum) with ultrahigh (1020 — 1023 W cm−2) electromagnetic fields are reviewed in terms of fabrication and testing technologies and possible use in the 2 — 60 nm wavelength range. The current worldwide status of and recent achievements by the Institute for Physics of Microstructures of the Russian Academy of Sciences (RAS) in the field are discussed.

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Fulltext is also available at DOI: 10.3367/UFNe.0182.201207c.0727
PACS: 41.50.+h, 42.79.−e, 95.55.Ka (all)
DOI: 10.3367/UFNe.0182.201207c.0727
URL: https://ufn.ru/en/articles/2012/7/c/
000309960400003
2-s2.0-84867566149
Citation: Barysheva M M, Pestov A E, Salashchenko N N, Toropov M N, Chkhalo N I "Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands" Phys. Usp. 55 681–699 (2012)
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Received: 27th, June 2011, 17th, August 2011

Оригинал: Барышева М М, Пестов А Е, Салащенко Н Н, Торопов М Н, Чхало Н И «Прецизионная изображающая многослойная оптика для мягкого рентгеновского и экстремального ультрафиолетового диапазонов» УФН 182 727–747 (2012); DOI: 10.3367/UFNr.0182.201207c.0727

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