Instruments and methods of investigation

Aperiodic multilayer structures in soft X-ray optics

 a,  b, c
a Kansai Photon Science Institute, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kyoto, Kizugawa-shi, 619-0215, Japan
b Moscow Institute of Physics and Technology (National Research University), Institutskii per. 9, Dolgoprudny, Moscow Region, 141701, Russian Federation
c Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

This paper reviews a series of studies that address the development and application of aperiodic multilayer structures (aperiodic multilayer mirrors) as soft X-ray (SXR) (λ ≈ 4—40 nm) optical elements. The paper discusses the potential of such structures for reflecting SXR radiation in a broad wavelength range, primarily at normal radiation incidence; and as polarization elements (broadband polarizer mirrors and phase shifters). The results of multiparametric optimization are presented, and experimental data for aperiodic Mo/Si (λ ⩾ 12.5 nm) multilayer mirrors are outlined. The feasibility of advancing to the λ ⩽ 12.5 nm domain due to the use of other materials is examined, and the capabilities of aperiodic structures as elements of attosecond SXR optics are discussed.

Fulltext is available at IOP
Keywords: soft X-ray/EUV optics, aperiodic multilayer structures, broadband multilayer mirrors, polarization optics, attosecond optical elements, imaging spectrometers
PACS: 07.60.−j, 42.30.−d, 42.79.−e (all)
DOI: 10.3367/UFNe.0185.201511e.1203
Citation: Pirozhkov A S, Ragozin E N "Aperiodic multilayer structures in soft X-ray optics" Phys. Usp. 58 1095–1105 (2015)
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Received: 25th, August 2015, 8th, September 2015

Оригинал: Пирожков А С, Рагозин Е Н «Апериодические многослойные структуры в оптике мягкого рентгеновского излучения» УФН 185 1203–1214 (2015); DOI: 10.3367/UFNr.0185.201511e.1203

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