Instruments and methods of investigation

Aperiodic multilayer structures in soft X-ray optics

 a,  b, c
a Kansai Photon Science Institute, Japan Atomic Energy Agency, 8-1-7 Umemidai, Kyoto, Kizugawa-shi, 619-0215, Japan
b Moscow Institute of Physics and Technology (State University), Institutskii per. 9, Dolgoprudnyi, Moscow Region, 141700, Russian Federation
c Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation

This paper reviews a series of studies that address the development and application of aperiodic multilayer structures (aperiodic multilayer mirrors) as soft X-ray (SXR) (λ ≈ 4—40 nm) optical elements. The paper discusses the potential of such structures for reflecting SXR radiation in a broad wavelength range, primarily at normal radiation incidence; and as polarization elements (broadband polarizer mirrors and phase shifters). The results of multiparametric optimization are presented, and experimental data for aperiodic Mo/Si (λ ⩾ 12.5 nm) multilayer mirrors are outlined. The feasibility of advancing to the λ ⩽ 12.5 nm domain due to the use of other materials is examined, and the capabilities of aperiodic structures as elements of attosecond SXR optics are discussed.

Text can be downloaded in Russian. English translation is available here.
Keywords: soft X-ray/EUV optics, aperiodic multilayer structures, broadband multilayer mirrors, polarization optics, attosecond optical elements, imaging spectrometers
PACS: 07.60.−j, 42.30.−d, 42.79.−e (all)
DOI: 10.3367/UFNe.0185.201511e.1203
Citation: Pirozhkov A S, Ragozin E N "Aperiodic multilayer structures in soft X-ray optics" Phys. Usp. 58 1095–1105 (2015)
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Received: 25th, August 2015, 8th, September 2015

Оригинал: Пирожков А С, Рагозин Е Н «Апериодические многослойные структуры в оптике мягкого рентгеновского излучения» УФН 185 1203–1214 (2015); DOI: 10.3367/UFNr.0185.201511e.1203

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