Issues

 / 

2009

 / 

September

  

Reviews of topical problems


Structure of silicon/oxide and nitride/oxide interfaces


Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Akad. Lavrenteva 13, Novosibirsk, 630090, Russian Federation

We systematize and generalize modern concepts on the atomic structure of silicon/insulator (Si/SiO2, Si=SiOxNy) and insulator/insulator (Si3N4/SiO2) interfaces in the structures underlying the operation of silicon devices.

Fulltext pdf (293 KB)
Fulltext is also available at DOI: 10.3367/UFNe.0179.200909a.0921
PACS: 61.43.−j, 61.66.Fn, 68.35.Dv, 71.55.Jv (all)
DOI: 10.3367/UFNe.0179.200909a.0921
URL: https://ufn.ru/en/articles/2009/9/a/
000274047000001
2-s2.0-76149089186
2009PhyU...52..869G
Citation: Gritsenko V A "Structure of silicon/oxide and nitride/oxide interfaces" Phys. Usp. 52 869–877 (2009)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Гриценко В А «Структура границ раздела кремний/оксид и нитрид/оксид» УФН 179 921–930 (2009); DOI: 10.3367/UFNr.0179.200909a.0921

References (43) Cited by (26) Similar articles (20) ↓

  1. V.A. Gritsenko “Atomic structure of the amorphous nonstoichiometric silicon oxides and nitrides51 699–708 (2008)
  2. V.A. Gritsenko “Hot electrons in silicon oxide60 902–910 (2017)
  3. T.V. Perevalov, V.A. Gritsenko “Application and electronic structure of high-permittivity dielectrics53 561–575 (2010)
  4. I.M. Lifshitz “Energy spectrum structure and quantum states of disordered condensed systems7 549–573 (1965)
  5. A.I. Gusev “Nonstoichiometry and superstructures57 839–876 (2014)
  6. L.N. Dem’yanets “High-temperature superconductors: growth of single crystals34 (1) 36–73 (1991)
  7. V.A. Kizel’, Yu.I. Krasilov, V.I. Burkov “Experimental studies of gyrotropy of crystals18 745–773 (1975)
  8. G.V. Kozlov, V.U. Novikov “A cluster model for the polymer amorphous state44 681–724 (2001)
  9. R.A. Andrievski “High-melting point compounds: new approaches and new results60 276–289 (2017)
  10. B.A. Klumov “Universal structural properties of three-dimensional and two-dimensional melts66 288–311 (2023)
  11. V.T. Dolgopolov “Two-dimensional system of strongly interacting electrons in silicon (100) structures62 633–648 (2019)
  12. L.V. Spivak “Synergy effects in the deformation response of thermodynamically open metal — hydrogen systems51 863–885 (2008)
  13. Yu.M. Romanovsky, A.N. Tikhonov “Molecular energy transducers of the living cell. Proton ATP synthase: a rotating molecular motor53 893–914 (2010)
  14. R. Folk, Yu. Holovatch, T. Yavorskii “Critical exponents of a three-dimensional weakly diluted quenched Ising model46 169–191 (2003)
  15. V.V. Brazhkin, A.G. Lyapin “Universal viscosity growth in metallic melts at megabar pressures: the vitreous state of the Earth’s inner core43 493–508 (2000)
  16. D.K. Belashchenko “Diffusion mechanisms in disordered systems: computer simulation42 297–319 (1999)
  17. M.P. Tonkonogov “Dielectric spectroscopy of hydrogen-bonded crystals, and proton relaxation41 25–48 (1998)
  18. A.I. Gusev “High-energy ball milling of nonstoichiometric compounds63 342–364 (2020)
  19. V.L. Kuz’min, V.P. Romanov “Coherent phenomena in light scattering from disordered systems39 231–260 (1996)
  20. N.P. Kobelev, V.A. Khonik “A novel view of the nature of formation of metallic glasses, their structural relaxation, and crystallization66 673–690 (2023)

The list is formed automatically.

© 1918–2024 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions