Reviews of topical problems

Hot electrons in silicon oxide

 a, b, c
a Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Lavrent'eva 13, Novosibirsk, 630090, Russian Federation
b Novosibirsk State University, ul. Pirogova2, Novosibirsk, 630090, Russian Federation
c Novosibirsk State Technical University, pr. K. Marksa 20, Novosibirsk, 630092, Russian Federation

One particular use of amorphous silicon oxide SiO2, a material crucial for silicon device technology and design, is as a flash memory tunnel dielectric. The breakdown field of SiO2 exceeds 107 V cm−1. Strong electric fields in SiO2 give rise to phenomena that do not occur in crystalline semiconductors. In relatively low electric fields (104 — 106 V cm−1) the electron distribution function is determined by the scattering of electrons by longitudinal optical phonons. In high fields (in excess of 106 V cm−1) the distribution function is determined by electron-acoustic phonon scattering.

Fulltext is available at IOP
Keywords: silicon oxide, hot electrons, scattering, optical phonons
PACS: 72.20.Ht, 72.20.Jv, 72.80.Sk, 73.40.Sx (all)
DOI: 10.3367/UFNe.2016.12.038008
Citation: Gritsenko V A "Hot electrons in silicon oxide" Phys. Usp. 60 902–910 (2017)
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Received: 2nd, September 2016, revised: 7th, December 2016, 8th, December 2016

:    « » 187 971–979 (2017); DOI: 10.3367/UFNr.2016.12.038008

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