A.A. Yakushkin
|
EUV Labs, Ltd.
Address: Sirenevy bulvar 1, Troitsk, Moscow, 142191, Russian Federation
|
|
Articles
- D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
|
See also:
A.Yu. Vinokhodov,
A.A. Lash,
D.B. Abramenko,
B.V. Lakatosh,
P.S. Antsiferov,
O.F. Yakushev,
I.P. Tsygvintsev,
A.D. Solomyannaya,
E.P. Snegirev,
Yu.V. Sidel’nikov,
A.N. Ryabtsev,
V.V. Medvedev,
M.V. Spiridonov,
V.M. Krivtsun,
A.S. Grushin
PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j
|
|
