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2007

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July

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Conferences and symposia


Research and development in short-wave radiation sources for new-generation lithography

 a,  b,  c
a Institute of Spectroscopy, Russian Academy of Sciences, ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
b ASML Netherlands B.V., De Run 6501, Veldhoven, 5504, The Netherlands
c Institute for Physics of Microstructures, Russian Academy of Sciences, ul. Ul'yanova 46, Nizhnii Novgorod, 603950, Russian Federation

A scientific session of the Physical Sciences Division of the Russian Academy of Sciences (RAS) was held in the Conference Hall of the P N Lebedev Physical Institute, RAS on 31 January 2007. The following reports were presented at the session:
(1) Koshelev K N (Institute of Spectroscopy, RAS, Troitsk, Moscow region), Banine V E (ASML, Veldhoven, the Netherlands), Salashchenko N N (Institute for the Physics of Microstructures, RAS, Nizhny Novgorod). ’Research and development in short-wave radiation sources for new-genera- tion lithography’;
(2) Balykin V I (Institute of Spectroscopy, RAS, Troitsk, Moscow region). ’Parallel fabrication of nanostructures via atom projection’;
(3) Lozovik Yu E, Popov A M (Institute of Spectroscopy, RAS, Troitsk, Moscow region). ’Properties and nanotechnological applications of nanotubes’.
An abridge version of the reports is given below.

Fulltext pdf (271 KB)
Fulltext is also available at DOI: 10.1070/PU2007v050n07ABEH006321
PACS: 01.10.Fv, 42.72.−g, 42.82.Cr (all)
DOI: 10.1070/PU2007v050n07ABEH006321
URL: https://ufn.ru/en/articles/2007/7/f/
2-s2.0-35948961904
2007PhyU...50..741K
Citation: Koshelev K N, Banine V E, Salashchenko N N "Research and development in short-wave radiation sources for new-generation lithography" Phys. Usp. 50 741–744 (2007)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Кошелев К Н, Банин В Е, Салащенко Н Н «Работы по созданию источников коротковолнового излучения для нового поколения литографии» УФН 177 777 (2007); DOI: 10.3367/UFNr.0177.200707h.0777

References (6) Cited by (3) Similar articles (20) ↓

  1. K.N. Koshelev, V.E. Banine et al “Scientific session of the Physical Sciences Division of the Russian Academy of Sciences (31 January 2007)” Phys. Usp. 50 741–744 (2007)
  2. V.I. Balykin “Parallel fabrication of nanostructures via atom projection” Phys. Usp. 50 744–749 (2007)
  3. Yu.E. Lozovik, A.M. Popov “Properties and nanotechnological applications of nanotubes” Phys. Usp. 50 749–761 (2007)
  4. D.B. Abramenko, P.S. Antsiferov et al “Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection” Phys. Usp. 62 304–314 (2019)
  5. O.N. Krokhin “Electric power transmission using laser radiation” Phys. Usp. 49 425–428 (2006)
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  8. V.N. Tsytovich “Polarization effects in a medium: from Vavilov-Cherenkov radiation and transition radiation to dust-particle pairing, or the development of one of V L Ginzburg’s ideas from 1940 to 2006” Phys. Usp. 50 545–553 (2007)
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  12. “Commemoration of the 85th birthday of S I Syrovatskii (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 26 May 2010)” Phys. Usp. 53 933–961 (2010)
  13. “Seventy years of the Pushkov Institute of Terrestrial Magnetism, Ionosphere and Radio Waves Propagation (IZMIRAN) (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 25 November 2009)” Phys. Usp. 53 487–534 (2010)
  14. Yu.E. Lozovik, S.P. Merkulova et al “Collective electron phenomena and electron transport in graphene (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 27 February 2008)” Phys. Usp. 51 727–748 (2008)
  15. V.P. Smirnov, S.V. Mirnov et al “Commemoration of the 80th anniversary of the birth of Academician B B Kadomtsev (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 10 December 2008)” Phys. Usp. 52 723–754 (2009)
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  17. V.I. Balykin, A.N. Ryabtsev et al “On the 40th anniversary of the Institute of Spectroscopy of the Russian Academy of Sciences (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 8 October 2008)” Phys. Usp. 52 275–309 (2009)
  18. “Celebrating 50 years of the laser (Joint scientific session of the Physical Sciences Division of the Russian Academy of Sciences and of the Scientific Councils of the P N Lebedev Physical Institute, RAS and the A M Prokhorov General Physics Institute, RAS, 21 April 2010)” Phys. Usp. 54 87–104 (2011)
  19. “Modern problems in the physical sciences (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 23 November 2011)” Phys. Usp. 55 721–738 (2012)
  20. “The 45th anniversary of the Institute of Spectroscopy of the Russian Academy of Sciences (Scientific session of the Physical Sciences Division of the Russian Academy of Sciences, 23 October 2013)” Phys. Usp. 57 604–629 (2014)

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