Konstantin Nikolaevich Koshelev



Institute of Spectroscopy, Russian Academy of Sciences
Address: ul. Fizicheskaya 5, Troitsk, Moscow, 108840, Russian Federation
Phone: +7 (495) 851-05-79
Fax: +7 (495) 851-08-86
Website:


Articles

Citations

1 D.B. Abramenko, P.S. Antsiferov, D.I. Astakhov et alPlasma-based sources of extreme ultraviolet radiation for lithography and mask inspectionPhys. Usp. 62 304–314 (2019) 23
2 K.N. Koshelev, V.E. Banine, N.N. Salashchenko “Research and development in short-wave radiation sources for new-generation lithographyPhys. Usp. 50 741–744 (2007) 3
3 K.N. Koshelev, V.E. Banine, N.N. Salashchenko et alScientific session of the Physical Sciences Division of the Russian Academy of Sciences (31 January 2007)Phys. Usp. 50 741–744 (2007) 1

27
K.N. Koshelev: total citation number of the papers published in Phys. Usp.

See also: N.N. Salashchenko, V.E. Banine, D.B. Abramenko, M.S. Krivokorytov, E.P. Snegirev, Yu.V. Sidel’nikov, A.N. Ryabtsev, P.S. Antsiferov, V.M. Krivtsun, V.V. Medvedev, V.V. Ivanov, D.I. Astakhov, L.A. Dorokhin, R.R. Gayazov, P.V. Krainov

PACS: 42.82.Cr, 52.25.Os, 52.59.-f, 52.70.-m, 52.77.-j, 42.72.-g

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