Physical and chemical fundamentals of three-dimensional (3D) micro- and nanoprinting are presented. 3D printing (or additive manufacturing technology) is a process which fabricates structures and devices by depositing material (usually, layer by layer) according to a 3D digital models. The methods and results reviewed here are limited to those from micro- and nanoscale fields that are in demand in the fields of electronics, photonics and bionics. Special attention is given to methods for fabricating sub-100-nm structures, including single- and two-photon polymerization stereolithography, electrohydrodynamic inkjet printing and laser-induced forward transfer. The advantages and disadvantages of 3D printing methods are discussed together with prospects for their development and application.

Keywords: 3D printing, additive technologies, 3D nanostructures, stereolithography, two-photon polymerization, inkjet printing, electrohydrodynamic printing, laser-induced forward transfer PACS: 32.80.Rm, 42.82.Cr, 61.46.−w, 68.65.−k, 81.20.−n (all) DOI: 10.3367/UFNe.2017.11.038239 URL: https://ufn.ru/en/articles/2019/1/e/ 000462478600004 2-s2.0-85065653282 2019PhyU...62...54F Citation: Fritzler K B, Prinz V Ya "3D printing methods for micro- and nanostructures" Phys. Usp. 62 54–69 (2019) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Received: 5th, June 2017, accepted: 10th, November 2017 Оригинал: Фрицлер К Б, Принц В Я «Методы трёхмерной печати микро- и наноструктур» УФН 189 55–71 (2019); DOI: 10.3367/UFNr.2017.11.038239