3D printing methods for micro- and nanostructures

K.B. Fritzler, V.Ya. Prinz
Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Lavrent'eva 13, Novosibirsk, 630090, Russian Federation

Physical and chemical fundamentals of three-dimensional (3D) micro- and nanoprinting are presented. 3D printing (or additive manufacturing technology) is a process which fabricates structures and devices by depositing material (usually, layer by layer) according to a 3D digital models. The methods and results reviewed here are limited to those from micro- and nanoscale fields that are in demand in the fields of electronics, photonics and bionics. Special attention is given to methods for fabricating sub-100-nm structures, including single- and two-photon polymerization stereolithography, electrohydrodynamic inkjet printing and laser-induced forward transfer. The advantages and disadvantages of 3D printing methods are discussed together with prospects for their development and application.

Keywords: 3D printing, additive technologies, 3D nanostructures, stereolithography, two-photon polymerization, inkjet printing, electrohydrodynamic printing, laser-induced forward transfer
PACS: 32.80.Rm, 42.82.Cr, 61.46.−w, 68.65.−k, 81.20.−n (all)
DOI: 10.3367/UFNe.2017.11.038239
URL: https://ufn.ru/en/articles/2019/1/e/
Web of Science

000462478600004
Scopus

2-s2.0-85065653282
ADS NASA

2019PhyU...62...54F
Citation: Fritzler K B, Prinz V Ya "3D printing methods for micro- and nanostructures" Phys. Usp. 62 54–69 (2019)

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Received: 5th, June 2017, accepted: 10th, November 2017

Оригинал: Фрицлер К Б, Принц В Я «Методы трёхмерной печати микро- и наноструктур» УФН 189 55–71 (2019); DOI: 10.3367/UFNr.2017.11.038239

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