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3D printing methods for micro- and nanostructures

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Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Lavrent'eva 13, Novosibirsk, 630090, Russian Federation

Physical and chemical fundamentals of three-dimensional (3D) micro- and nanoprinting are presented. 3D printing (or additive manufacturing technology) is a process which fabricates structures and devices by depositing material (usually, layer by layer) according to a 3D digital models. The methods and results reviewed here are limited to those from micro- and nanoscale fields that are in demand in the fields of electronics, photonics and bionics. Special attention is given to methods for fabricating sub-100-nm structures, including single- and two-photon polymerization stereolithography, electrohydrodynamic inkjet printing and laser-induced forward transfer. The advantages and disadvantages of 3D printing methods are discussed together with prospects for their development and application.

Fulltext is available at IOP
Keywords: 3D printing, additive technologies, 3D nanostructures, stereolithography, two-photon polymerization, inkjet printing, electrohydrodynamic printing, laser-induced forward transfer
PACS: 32.80.Rm, 42.82.Cr, 61.46.−w, 68.65.−k, 81.20.−n (all)
DOI: 10.3367/UFNe.2017.11.038239
URL: https://ufn.ru/en/articles/2019/1/e/
Citation: Fritzler K B, Prinz V Ya "3D printing methods for micro- and nanostructures" Phys. Usp. 62 54–69 (2019)
BibTexBibNote ® (generic)BibNote ® (RIS)Medline RefWorks
RT Journal
T1 3D printing methods for micro- and nanostructures
A1 Fritzler,K.B.
A1 Prinz,V.Ya.
PB Physics-Uspekhi
PY 2019
FD 10 Jan, 2019
JF Physics-Uspekhi
JO Phys. Usp.
VO 62
IS 1
SP 54-69
DO 10.3367/UFNe.2017.11.038239
LK https://ufn.ru/en/articles/2019/1/e/

Received: 5th, June 2017, 10th, November 2017

Оригинал: Фрицлер К Б, Принц В Я «Методы трёхмерной печати микро- и наноструктур» УФН 189 55–71 (2019); DOI: 10.3367/UFNr.2017.11.038239

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