Application and electronic structure of high-permittivity dielectrics

T.V. Perevalov, V.A. Gritsenko
Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Lavrent'eva 13, Novosibirsk, 630090, Russian Federation

Major applications of high-permittivity dielectric materials in silicon devices are reviewed. The basics and software implementations of the electron density functional method are considered. Results of first-principle calculations of the electronic structure are analyzed for the three most important and promising high-permittivity dielectrics, Al₂O₃, HfO₂ and TiO₂.

PACS: 71.15.Mb, 77.55.D−, 85.30.−z (all)
DOI: 10.3367/UFNe.0180.201006b.0587
URL: https://ufn.ru/en/articles/2010/6/b/
Web of Science

000281644500002
Scopus

2-s2.0-77958606853
ADS NASA

2010PhyU...53..561P
Citation: Perevalov T V, Gritsenko V A "Application and electronic structure of high-permittivity dielectrics" Phys. Usp. 53 561–575 (2010)

BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Перевалов Т В, Гриценко В А «Применение и электронная структура диэлектриков с высокой диэлектрической проницаемостью» УФН 180 587–603 (2010); DOI: 10.3367/UFNr.0180.201006b.0587

References (100) Cited by (64) Similar articles (20) ↓

V.A. Gritsenko “Atomic structure of the amorphous nonstoichiometric silicon oxides and nitrides” Phys. Usp. 51 699–708 (2008)
V.A. Gritsenko “Structure of silicon/oxide and nitride/oxide interfaces” Phys. Usp. 52 869–877 (2009)
V.A. Gritsenko “Hot electrons in silicon oxide” Phys. Usp. 60 902–910 (2017)
R.S. Berry, B.M. Smirnov “Modeling of configurational transitions in atomic systems” Phys. Usp. 56 973–998 (2013)
R.A. Andrievski “High-melting point compounds: new approaches and new results” Phys. Usp. 60 276–289 (2017)
B.I. Shklovskii, A.L. Éfros “Percolation theory and conductivity of strongly inhomogeneous media” Sov. Phys. Usp. 18 845–862 (1975)
E.G. Maksimov, A.E. Karakozov “On nonadiabatic effects in phonon spectra of metals” Phys. Usp. 51 535–549 (2008)
A.S. Mishchenko “Electron — phonon coupling in underdoped high-temperature superconductors” Phys. Usp. 52 1193–1212 (2009)
E.Z. Kuchinskii, I.A. Nekrasov, M.V. Sadovskii “Generalized dynamical mean-field theory in the physics of strongly correlated systems” Phys. Usp. 55 325–355 (2012)
G.V. Shpatakovskaya “Semiclassical model of the structure of matter” Phys. Usp. 55 429–464 (2012)
E.G. Maksimov, V.I. Zinenko, N.G. Zamkova “Ab initio calculations of the physical properties of ionic crystals” Phys. Usp. 47 1075–1099 (2004)
A.V. Eletskii, I.M. Iskandarova et al “Graphene: fabrication methods and thermophysical properties” Phys. Usp. 54 227–258 (2011)
B.M. Smirnov “Processes involving clusters and small particles in a buffer gas” Phys. Usp. 54 691–721 (2011)
O.E. Kvyatkovskii, E.G. Maksimov “Microscopic theory of the lattice dynamics and the nature of the ferroelectric instability in crystals” Sov. Phys. Usp. 31 1–26 (1988)
A.I. Voropinov, G.M. Gandel’man, V.G. Podval’nyi “Electronic energy spectra and the equation of state of solids at high pressures and temperatures” Sov. Phys. Usp. 13 56–72 (1970)
R.S. Berry, B.M. Smirnov “Phase transitions in various kinds of clusters” Phys. Usp. 52 137–164 (2009)
E.G. Maksimov, D.Yu. Savrasov, S.Yu. Savrasov “The electron-phonon interaction and the physical properties of metals” Phys. Usp. 40 337–358 (1997)
N.N. Bogolyubov “The compensation principle and the self-consistent field method” Sov. Phys. Usp. 2 236–254 (1959)
S.R. Gabuda, S.G. Kozlova, A.G. Lundin “NMR in Van Vleck magnetics and intermolecular interactions in molecular crystals and Chevrel phases” Phys. Usp. 54 499–517 (2011)
N.N. Kolachevsky “Laboratory search for time variation in the fine structure constant” Phys. Usp. 47 1101–1118 (2004)

The list is formed automatically.