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X-ray lithography in synchrotron radiation beams

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Fulltext pdf (260 KB)
Fulltext is also available at DOI: 10.1070/PU1979v022n05ABEH005503
PACS: 01.10.Fv
DOI: 10.1070/PU1979v022n05ABEH005503
URL: https://ufn.ru/en/articles/1979/5/h/
Citation: Aleksandrov Yu M, Krivospitskii A D, Yakimenko M N "X-ray lithography in synchrotron radiation beams" Sov. Phys. Usp. 22 383–384 (1979)
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Оригинал: Александров Ю М, Кривоспицкий А Д, Якименко М Н «Рентгенолитография в пучках синхротронного излучения» УФН 128 180–181 (1979); DOI: 10.3367/UFNr.0128.197905i.0180

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