PACS:01.10.Fv DOI:10.1070/PU1976v019n12ABEH005380 URL: https://ufn.ru/en/articles/1976/12/j/ Citation: Zaripov M M, Khaybullin I B, Shtyrkov E I "Annealing of Ion-Implanted Layers Under the Action of Laser Radiation" Sov. Phys. Usp.19 1032–1033 (1976)