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X-ray lithography in synchrotron radiation beams

Text can be downloaded in Russian. English translation is available here.
PACS: 01.10.Fv
DOI: 10.1070/PU1979v022n05ABEH005503
URL: https://ufn.ru/en/articles/1979/5/h/
Citation: Aleksandrov Yu M, Krivospitskii A D, Yakimenko M N "X-ray lithography in synchrotron radiation beams" Sov. Phys. Usp. 22 383–384 (1979)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks
@article{Aleksandrov:1979,
	author = {Yu. M. Aleksandrov and A. D. Krivospitskii and M. N. Yakimenko},
	title = {X-ray lithography in synchrotron radiation beams},
	publisher = {Physics-Uspekhi},
	year = {1979},
	journal = {Phys. Usp.},
	volume = {22},
	number = {5},
	pages = {383-384},
	url = {https://ufn.ru/en/articles/1979/5/h/},
	doi = {10.1070/PU1979v022n05ABEH005503}
}

Оригинал: Александров Ю М, Кривоспицкий А Д, Якименко М Н «Рентгенолитография в пучках синхротронного излучения» УФН 128 180–181 (1979); DOI: 10.3367/UFNr.0128.197905i.0180

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