85.40.−e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology

P.V. Ratnikov, A.P. Silin “Two-dimensional graphene electronics: current status and prospects” Phys. Usp. 61 1139–1174 (2018)
68.65.Cd, 68.65.Pq, 73.21.Fg, 73.40.Gk, 73.50.−h, 85.30.Tv, 85.40.−e, 85.60.−q, 85.65.+h (all)
“Celebrating 50 years of the laser (Scientific session of the General Meeting of the Physical Sciences Division of the Russian Academy of Sciences, 13 December 2010)” Phys. Usp. 54 837–870 (2011)
01.10.Fv, 03.75.−b, 07.57.−c, 32.30.Jc, 37.10.−x, 37.10.De, 37.10.Gh, 42.62.−b, 42.65.−k, 42.70.−a, 42.82.−m, 67.85.−d, 78.67.−n, 85.40.−e, 84.40.Ik (all)
N.N. Ledentsov, J.A. Lott “New-generation vertically emitting lasers as a key factor in the computer communication era” Phys. Usp. 54 853–858 (2011)
42.62.−b, 42.82.−m, 85.40.−e (all)
A.I. Vorob’eva “Fabrication techniques of electrode arrays for carbon nanotubes” Phys. Usp. 52 225–234 (2009)
73.63.Fg, 85.35.Kt, 85.40.−e (all)
V.B. Timofeev “Current state of semiconductor silicon technology and material science” Sov. Phys. Usp. 33 (6) 492–493 (1990)
01.30.Vv, 85.40.−e, 81.10.−h, 81.15.−z (all)
M.I. Elinson “Problems of Functional Microelectronics” Sov. Phys. Usp. 16 281–281 (1973)
85.40.−e, 85.30.−z (all)
K.A. Valiev “Present-day Semiconductor Microelectronics and the Prospects of its Development” Sov. Phys. Usp. 16 281–283 (1973)
85.40.−e, 85.30.−z, 73.40.Kp, 73.40.Lq (all)
A.M. Kugushev “RADIO ELECTRONICS (On the 100th Birthday of A. S. Popov)” Sov. Phys. Usp. 2 305–328 (1959)
84.40.Ua, 41.20.Jb, 85.40.−e, 84.40.Xb (all)

PACS numbers