Fabrication techniques of electrode arrays for carbon nanotubes
Belarusian State University of Informatics and Radioelectronics, P. Brovki str. 6, Minsk, 220013, Belarus
Techniques for fabricating electrode arrays for carbon nanotubes used as structural elements of various nanoelectronic devices are reviewed. Ways of reducing electrode resistivity and contact resistance in metal — carbon nanotube structures are examined. Advances in and prospects for using
nanotubes as interlevel contact junctions in IC multilevel metallization systems are discussed.