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Fabrication techniques of electrode arrays for carbon nanotubes

Belarusian State University of Informatics and Radioelectronics, P. Brovki str. 6, Minsk, 220013, Belarus

Techniques for fabricating electrode arrays for carbon nanotubes used as structural elements of various nanoelectronic devices are reviewed. Ways of reducing electrode resistivity and contact resistance in metal — carbon nanotube structures are examined. Advances in and prospects for using nanotubes as interlevel contact junctions in IC multilevel metallization systems are discussed.

Fulltext is available at IOP
PACS: 73.63.Fg, 85.35.Kt, 85.40.−e (all)
DOI: 10.3367/UFNe.0179.200903b.0243
Citation: Vorob’eva A I "Fabrication techniques of electrode arrays for carbon nanotubes" Phys. Usp. 52 225–234 (2009)
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Оригинал: Воробьева А И «Электродные системы к углеродным нанотрубкам и методы их изготовления» УФН 179 243–253 (2009); DOI: 10.3367/UFNr.0179.200903b.0243

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