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Present-day Semiconductor Microelectronics and the Prospects of its Development


Institute of Physics and Technology, Russian Academy of Sciences, Nakhimovskii prosp. 34, Moscow, 117218, Russian Federation
PACS: 85.40.−e, 85.30.−z, 73.40.Kp, 73.40.Lq (all)
DOI: 10.1070/PU1973v016n02ABEH005173
URL: https://ufn.ru/en/articles/1973/2/k/
Citation: Valiev K A "Present-day Semiconductor Microelectronics and the Prospects of its Development" Sov. Phys. Usp. 16 281–283 (1973)
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Оригинал: Валиев К А «Современная полупроводниковая микроэлектроника и перспективы ее развития» УФН 109 765–768 (1973); DOI: 10.3367/UFNr.0109.197304j.0765

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