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Present-day Semiconductor Microelectronics and the Prospects of its Development


Institute of Physics and Technology, Russian Academy of Sciences, Nakhimovskii prosp. 34, Moscow, 117218, Russian Federation
Text can be downloaded in Russian. English translation is available here.
PACS: 85.40.−e, 85.30.−z, 73.40.Kp, 73.40.Lq (all)
DOI: 10.1070/PU1973v016n02ABEH005173
URL: https://ufn.ru/en/articles/1973/2/k/
Citation: Valiev K A "Present-day Semiconductor Microelectronics and the Prospects of its Development" Sov. Phys. Usp. 16 281–283 (1973)
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Оригинал: Валиев К А «Современная полупроводниковая микроэлектроника и перспективы ее развития» УФН 109 765–768 (1973); DOI: 10.3367/UFNr.0109.197304j.0765

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