Fabrication techniques of electrode arrays for carbon nanotubes

Techniques for fabricating electrode arrays for carbon nanotubes used as structural elements of various nanoelectronic devices are reviewed. Ways of reducing electrode resistivity and contact resistance in metal — carbon nanotube structures are examined. Advances in and prospects for using nanotubes as interlevel contact junctions in IC multilevel metallization systems are discussed.

PACS: 73.63.Fg, 85.35.Kt, 85.40.−e (all)
DOI: 10.3367/UFNe.0179.200903b.0243
URL: https://ufn.ru/en/articles/2009/3/b/
Web of Science

000267730600002
Scopus

2-s2.0-68249146273
ADS NASA

2009PhyU...52..225V
Citation: Vorob’eva A I "Fabrication techniques of electrode arrays for carbon nanotubes" Phys. Usp. 52 225–234 (2009)

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Оригинал: Воробьева А И «Электродные системы к углеродным нанотрубкам и методы их изготовления» УФН 179 243–253 (2009); DOI: 10.3367/UFNr.0179.200903b.0243

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