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From the current literature


Fabrication techniques of electrode arrays for carbon nanotubes


Belarusian State University of Informatics and Radioelectronics, P. Brovki str. 6, Minsk, 220013, Belarus

Techniques for fabricating electrode arrays for carbon nanotubes used as structural elements of various nanoelectronic devices are reviewed. Ways of reducing electrode resistivity and contact resistance in metal — carbon nanotube structures are examined. Advances in and prospects for using nanotubes as interlevel contact junctions in IC multilevel metallization systems are discussed.

Fulltext is available at IOP
PACS: 73.63.Fg, 85.35.Kt, 85.40.−e (all)
DOI: 10.3367/UFNe.0179.200903b.0243
URL: https://ufn.ru/en/articles/2009/3/b/
Citation: Vorob’eva A I "Fabrication techniques of electrode arrays for carbon nanotubes" Phys. Usp. 52 225–234 (2009)
BibTexBibNote ® (generic) BibNote ® (RIS)MedlineRefWorks
TY JOUR
TI Fabrication techniques of electrode arrays for carbon nanotubes
AU Vorob’eva, A. I.
PB Physics-Uspekhi
PY 2009
JO Physics-Uspekhi
JF Physics-Uspekhi
JA Phys. Usp.
VL 52
IS 3
SP 225-234
UR https://ufn.ru/en/articles/2009/3/b/
ER https://doi.org/10.3367/UFNe.0179.200903b.0243

Оригинал: Воробьева А И «Электродные системы к углеродным нанотрубкам и методы их изготовления» УФН 179 243–253 (2009); DOI: 10.3367/UFNr.0179.200903b.0243

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