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From the current literature


Fabrication techniques of electrode arrays for carbon nanotubes


Belarusian State University of Informatics and Radioelectronics, P. Brovki str. 6, Minsk, 220013, Belarus

Techniques for fabricating electrode arrays for carbon nanotubes used as structural elements of various nanoelectronic devices are reviewed. Ways of reducing electrode resistivity and contact resistance in metal — carbon nanotube structures are examined. Advances in and prospects for using nanotubes as interlevel contact junctions in IC multilevel metallization systems are discussed.

Fulltext pdf (563 KB)
Fulltext is also available at DOI: 10.3367/UFNe.0179.200903b.0243
PACS: 73.63.Fg, 85.35.Kt, 85.40.−e (all)
DOI: 10.3367/UFNe.0179.200903b.0243
URL: https://ufn.ru/en/articles/2009/3/b/
000267730600002
2-s2.0-68249146273
2009PhyU...52..225V
Citation: Vorob’eva A I "Fabrication techniques of electrode arrays for carbon nanotubes" Phys. Usp. 52 225–234 (2009)
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Оригинал: Воробьева А И «Электродные системы к углеродным нанотрубкам и методы их изготовления» УФН 179 243–253 (2009); DOI: 10.3367/UFNr.0179.200903b.0243

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