Issues

 / 

2009

 / 

March

  

From the current literature


Fabrication techniques of electrode arrays for carbon nanotubes


Belarusian State University of Informatics and Radioelectronics, P. Brovki str. 6, Minsk, 220013, Belarus

Techniques for fabricating electrode arrays for carbon nanotubes used as structural elements of various nanoelectronic devices are reviewed. Ways of reducing electrode resistivity and contact resistance in metal — carbon nanotube structures are examined. Advances in and prospects for using nanotubes as interlevel contact junctions in IC multilevel metallization systems are discussed.

Fulltext is available at IOP
PACS: 73.63.Fg, 85.35.Kt, 85.40.−e (all)
DOI: 10.3367/UFNe.0179.200903b.0243
URL: https://ufn.ru/en/articles/2009/3/b/
Citation: Vorob’eva A I "Fabrication techniques of electrode arrays for carbon nanotubes" Phys. Usp. 52 225–234 (2009)
BibTexBibNote ® (generic)BibNote ® (RIS) MedlineRefWorks
PT Journal Article
TI Fabrication techniques of electrode arrays for carbon nanotubes
AU Vorob’eva A I
FAU Vorob’eva AI
DP 10 Mar, 2009
TA Phys. Usp.
VI 52
IP 3
PG 225-234
RX 10.3367/UFNe.0179.200903b.0243
URL https://ufn.ru/en/articles/2009/3/b/
SO Phys. Usp. 2009 Mar 10;52(3):225-234

Оригинал: Воробьева А И «Электродные системы к углеродным нанотрубкам и методы их изготовления» УФН 179 243–253 (2009); DOI: 10.3367/UFNr.0179.200903b.0243

© 1918–2021 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions