Techniques for fabricating electrode arrays for carbon nanotubes used as structural elements of various nanoelectronic devices are reviewed. Ways of reducing electrode resistivity and contact resistance in metal — carbon nanotube structures are examined. Advances in and prospects for using nanotubes as interlevel contact junctions in IC multilevel metallization systems are discussed.

PACS: 73.63.Fg, 85.35.Kt, 85.40.−e (all) DOI: 10.3367/UFNe.0179.200903b.0243 URL: https://ufn.ru/en/articles/2009/3/b/ 000267730600002 2-s2.0-68249146273 2009PhyU...52..225V Citation: Vorob’eva A I "Fabrication techniques of electrode arrays for carbon nanotubes" Phys. Usp. 52 225–234 (2009) BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks Оригинал: Воробьева А И «Электродные системы к углеродным нанотрубкам и методы их изготовления» УФН 179 243–253 (2009); DOI: 10.3367/UFNr.0179.200903b.0243