Physical mechanisms underlying the selective removal of atoms

This paper reviews the current understanding of the selective removal of atoms (SRA), a technique that uses ion irradiation to controllably change the chemical composition and properties of polyatomic materials. The main effects involved and the possible mechanisms that govern the process are discussed. It is shown that SRA holds great promise for manufacturing functional nanoelements.

PACS: 79.20.Rf, 81.07.−b, 81.16.−c (all)
DOI: 10.3367/UFNe.0179.200902d.0179
URL: https://ufn.ru/en/articles/2009/2/c/
Web of Science

000267067000003
Scopus

2-s2.0-68249138511
ADS NASA

2009PhyU...52..165G
Citation: Gurovich B A, Prikhod’ko K E "Physical mechanisms underlying the selective removal of atoms" Phys. Usp. 52 165–178 (2009)

BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Гурович Б А, Приходько К Е «Физические механизмы, лежащие в основе процесса селективного удаления атомов» УФН 179 179–195 (2009); DOI: 10.3367/UFNr.0179.200902d.0179

References (24) Cited by (23) Similar articles (12) ↓

B.A. Gurovich, D.I. Dolgii et al “Controlled ion-beam transformation of electrical, magnetic, and optical materials properties” Phys. Usp. 44 95–105 (2001)
Ya.S. Greenberg, Yu.A. Pashkin, E. Il’ichev “Nanomechanical resonators” Phys. Usp. 55 382–407 (2012)
G.V. Murastov, A.A. Lipovka et al “Laser reduction of graphene oxide: local control of material properties” Phys. Usp. 66 1105–1133 (2023)
I.B. Borovskii, R.V. Vedrinskii et al “EXAFS spectroscopy: a new method for structural investigation” Sov. Phys. Usp. 29 539–569 (1986)
V.I. Krauz, Yu.V. Martynenko et al “Nanostructures in controlled thermonuclear fusion devices” Phys. Usp. 53 1015–1038 (2010)
I.V. Antonova “Chemical vapor deposition growth of graphene on copper substrates: current trends” Phys. Usp. 56 1013–1020 (2013)
V.G. Kurt, E.N. Mironova “The methods of local interstellar medium investigation” Phys. Usp. 56 910–918 (2013)
A.D. Pogrebnjak, A.A. Bagdasaryan et al “Adaptive multicomponent nanocomposite coatings in surface engineering” Phys. Usp. 60 586–607 (2017)
M.A. Proskurnin, V.R. Khabibullin et al “Photothermal and optoacoustic spectroscopy: state of the art and prospects” Phys. Usp. 65 270–312 (2022)
V.V. Lider “X-ray refraction introscopy” Phys. Usp. 67 325–337 (2024)
V.I. Gvozdev, G.A. Kuzaev et al “Physical principles of the modeling of three-dimensional microwave and extremely high frequency integrated circuits” Sov. Phys. Usp. 35 (3) 212–230 (1992)
V.A. Belyakov, V.E. Dmitrienko “Polarization phenomena in x-ray optics” Sov. Phys. Usp. 32 697–719 (1989)

The list is formed automatically.