Physical mechanisms underlying the selective removal of atoms

This paper reviews the current understanding of the selective removal of atoms (SRA), a technique that uses ion irradiation to controllably change the chemical composition and properties of polyatomic materials. The main effects involved and the possible mechanisms that govern the process are discussed. It is shown that SRA holds great promise for manufacturing functional nanoelements.

PACS: 79.20.Rf, 81.07.−b, 81.16.−c (all)
DOI: 10.3367/UFNe.0179.200902d.0179
URL: https://ufn.ru/en/articles/2009/2/c/
Web of Science

000267067000003
Scopus

2-s2.0-68249138511
ADS NASA

2009PhyU...52..165G
Citation: Gurovich B A, Prikhod’ko K E "Physical mechanisms underlying the selective removal of atoms" Phys. Usp. 52 165–178 (2009)

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Оригинал: Гурович Б А, Приходько К Е «Физические механизмы, лежащие в основе процесса селективного удаления атомов» УФН 179 179–195 (2009); DOI: 10.3367/UFNr.0179.200902d.0179

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