81.16.−c Methods of micro- and nanofabrication and processing
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G.N. Makarov “Laser applications in nanotechnology: nanofabrication using laser ablation and laser nanolithography” 56 643–682 (2013)
36.40.−c, 42.62.Fi, 61.46.−w, 81.05.ue, 81.07.−b, 81.16.−c, 81.16.Nd (all)
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B.A. Gurovich, K.E. Prikhod’ko “Physical mechanisms underlying the selective removal of atoms” 52 165–178 (2009)
79.20.Rf, 81.07.−b, 81.16.−c (all)
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A.A. Shklyaev, M. Ichikawa “Extremely dense arrays of germanium and silicon nanostructures” 51 133–161 (2008)
78.55.Ap, 81.07.−b, 81.16.−c (all)
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V.I. Balykin “Parallel fabrication of nanostructures via atom projection” 50 744–749 (2007)
01.10.Fv, 81.07.−b, 81.16.−c, 81.16.Ta (all)
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