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Physical mechanisms underlying the selective removal of atoms

,
National Research Centre Kurchatov Institute, pl. akad. Kurchatova 1, Moscow, 123182, Russian Federation

This paper reviews the current understanding of the selective removal of atoms (SRA), a technique that uses ion irradiation to controllably change the chemical composition and properties of polyatomic materials. The main effects involved and the possible mechanisms that govern the process are discussed. It is shown that SRA holds great promise for manufacturing functional nanoelements.

Fulltext is available at IOP
PACS: 79.20.Rf, 81.07.−b, 81.16.−c (all)
DOI: 10.3367/UFNe.0179.200902d.0179
URL: https://ufn.ru/en/articles/2009/2/c/
Citation: Gurovich B A, Prikhod’ko K E "Physical mechanisms underlying the selective removal of atoms" Phys. Usp. 52 165–178 (2009)
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:   ,    « ,   » 179 179–195 (2009); DOI: 10.3367/UFNr.0179.200902d.0179

References (24) ↓ Cited by (20) Similar articles (6)

  1. Gurovich B A i dr. Usp. Fiz. Nauk 171 105 (2001); Gurovich B A et al. Phys. Usp. 44 95 (2001)
  2. Gurovich B A et al. Microelectron. Eng. 69 358 (2003)
  3. Gurovich B A, Domantovskii A G, Maslakov K I, Prikhod’ko K E Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (10) 67 (2004)
  4. Gurovich B A et al. In Nanostructured Magnetic Materials And Their Applications (Eds B Aktas, L Tagirov, F Mikailov) (Dordrecht: Kluwer Acad. Publ., 2004) p. 13
  5. Gurovich B A, Domantovskii A G, Maslakov K I, Prikhod’ko K E Poverkhnost’. Rentgenovskie, Sinkhrotronnye Neitronnye Issledovaniya (5) 25 (2008); Gurovich B A, Domantovskii A G, Maslakov K I, Prikhod’ko K E J.Surf. Invest. X-Ray, Synchr. Neutron. Tech. 2 352 (2008)
  6. Gurovich B et al. Proc. SPIE 6260 626005 (2006)
  7. Prikhod’ko K E Voprosy Atomnoi Nauki Tekhniki. Ser. Fizika Radiatsionnykh Povrezhdenii Radiatsionnoe Materialovedenie 3 36 (2002)
  8. Ziegler J F, Biersack J P, Ziegler M D The Stopping And Range Of Ions In Matter (Morrisville, NC: Lulu Press Co., 2008); http://www.srim.org
  9. Gurovich B A i dr. Fiz. Tekh. Poluprovodn. 38 1074 (2004); Gurovich B A et al. Semiconductors 38 1036 (2004)
  10. Domantovskii A G, Gurovich B A, Maslakov K I Crystallogr. Rep. 51 (Suppl. 1) S196 (2006)
  11. International Technology RoadMap For Semiconductors. Process Integration, Devices And Structures (2007) p. 6; http://www.itrs.net/Links/2007ITRS/2007_Chapters/2007_PIDS.pdf
  12. Kelly B T Irradiation Damage To Solids (Oxford: Pergamon Press, 1966); Kelli B Radiatsionnoe Povrezhdenie Tverdykh Tel (M.: Atomizdat, 1970)
  13. Dzhafarov T D Radiatsionno-ctimulirovannaya Diffuziya v Poluprovodnikakh (M.: Energoatomizdat, 1991)
  14. Akasaka N et al. In Effects Of Radiation On Materials: 21st Symp. (ASTM Special Technical Publ., Vol. 1447, Eds M L Grossbeck Et Al.) (West Conshohocken, PA: ASTM Intern., 2004) p. 516
  15. Smirnov L S Fizicheskie Protsessy v Obluchennykh Poluprovodnikakh (Novosibirsk: Nauka, 1977)
  16. Maury F et al. Radiat. Effects Defects Solids 38 53 (1978)
  17. Gurovich B A Prikhodko K E Radiat. Effects Defects Solids 154 39 (2001)
  18. Prikhod’ko K E, Gurovich B A Voprosy Atomnoi Nauki Tekhniki. Ser. Fizika Radiatsionnykh Povrezhdenii Yavlenii Tverdykh Telakh (4) 34 (2000)
  19. Hren J J, Goldstein J I, Joy D C (Eds) Introduction To Analytical Electron Microscopy (New York: Plenum Press, 1979); Gren Dzh, Gol’dshtein Dzh I, Dzhoi D K (Red.) Osnovy Analiticheskoi Elektronnoi Mikroskopii (M.: Metallurgiya, 1990)
  20. Barnard R S, Ph.D. Thesis (Cleveland, OH: Case Western Reserve Univ., 1977)
  21. Pells G P, Phillips D C UKAEA Res. Rep. AERE-R9138 (1978)
  22. Gurovich B et al. In Magnetic Nanostructures (Springer Ser. In Materials Science, Vol. 94, Eds B Aktas, L Tagirov, F Mikailov) (Berlin: Springer, 2007) p. 47
  23. Gurovich B A i dr. Nano- Mikrosistemnaya Tekhnika (4) 2 (2007)
  24. Gurovich B A i dr. Prikladnaya Fizika (1) 44 (2008)

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