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2009

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February

  

Instruments and methods of investigation


Physical mechanisms underlying the selective removal of atoms

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National Research Centre ‘Kurchatov Institute’, pl. akad. Kurchatova 1, Moscow, 123182, Russian Federation

This paper reviews the current understanding of the selective removal of atoms (SRA), a technique that uses ion irradiation to controllably change the chemical composition and properties of polyatomic materials. The main effects involved and the possible mechanisms that govern the process are discussed. It is shown that SRA holds great promise for manufacturing functional nanoelements.

Fulltext pdf (885 KB)
Fulltext is also available at DOI: 10.3367/UFNe.0179.200902d.0179
PACS: 79.20.Rf, 81.07.−b, 81.16.−c (all)
DOI: 10.3367/UFNe.0179.200902d.0179
URL: https://ufn.ru/en/articles/2009/2/c/
000267067000003
2-s2.0-68249138511
2009PhyU...52..165G
Citation: Gurovich B A, Prikhod’ko K E "Physical mechanisms underlying the selective removal of atoms" Phys. Usp. 52 165–178 (2009)
BibTexBibNote ® (generic)BibNote ® (RIS)Medline RefWorks
RT Journal
T1 Physical mechanisms underlying the selective removal of atoms
A1 Gurovich,B.A.
A1 Prikhod’ko,K.E.
PB Physics-Uspekhi
PY 2009
FD 10 Feb, 2009
JF Physics-Uspekhi
JO Phys. Usp.
VO 52
IS 2
SP 165-178
DO 10.3367/UFNe.0179.200902d.0179
LK https://ufn.ru/en/articles/2009/2/c/

Оригинал: Гурович Б А, Приходько К Е «Физические механизмы, лежащие в основе процесса селективного удаления атомов» УФН 179 179–195 (2009); DOI: 10.3367/UFNr.0179.200902d.0179

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