RSS feeds
РусскийEnglish
Issue 12, 2024
Volume year page
Issues Authors PACS Subscription For authors

Issues

 / 

2008

 / 

July

←  →

Reviews of topical problems


Atomic structure of the amorphous nonstoichiometric silicon oxides and nitrides


Rzhanov Institute of Semiconductor Physics, Siberian Branch of the Russian Academy of Sciences, prosp. Akad. Lavrenteva 13, Novosibirsk, 630090, Russian Federation

In addition to amorphous SiO2 and Si3N4, the two key dielectric film materials used in modern silicon devices, the fabrication technology of nonstoichiometric SiOxNy, SiNx, and SiOx compounds is currently under development. Varying the chemical composition of these compounds allows a wide range of control over their physical — specifically, optical and electrical — properties. The development of technology for synthesizing such films requires a detailed understanding of their atomic structure. Current views on the atomic structure of nonstoichiometric silicon nitrides and oxides are reviewed and summarized.

Fulltext pdf (431 KB)
Fulltext is also available at DOI: 10.1070/PU2008v051n07ABEH006592
PACS: 33.60.Fy, 61.43.−j, 61.66.Fn, 68.35.Dv, 71.55.Jv (all)
DOI: 10.1070/PU2008v051n07ABEH006592
URL: https://ufn.ru/en/articles/2008/7/c/
000260580700003
2-s2.0-55749101208
2008PhyU...51..699G
Citation: Gritsenko V A "Atomic structure of the amorphous nonstoichiometric silicon oxides and nitrides" Phys. Usp. 51 699–708 (2008)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Оригинал: Гриценко В А «Атомная структура аморфных нестехиометрических оксидов и нитридов кремния» УФН 178 727–737 (2008); DOI: 10.3367/UFNr.0178.200807c.0727

References (30) Cited by (62) ↓ Similar articles (20)

  1. Topka K Ch, Diallo B et al ACS Appl. Eng. Mater. 1 3268 (2023)
  2. Makeev V V, Teplov G S, Sattarov P Sh Elektronnaya Tekhnika. Seriya 3. Mikroelektronika (4) 43 (2022)
  3. Kovalchuk N S, Marudo Yu A et al High Temp Mat Proc 26 59 (2022)
  4. Mota-Santiago P, Nadzri A et al J. Phys. D: Appl. Phys. 55 145301 (2022)
  5. Makeev V V, Teplov G S, Sattarov P Sh Elektronnaya Tekhnika. Seriya 3. Mikroelektronika (4) 34 (2022)
  6. Kovalchuk N S, Marudo Yu A et al Journal Of The Belarusian State University. Physics (1) 80 (2022)
  7. Amosov A V, Kulchin Yu N et al Journal Of Luminescence 243 118615 (2022)
  8. Gornev E S, Matyushkin I V, Kalimova I F Elektronnaya Tekhnika. Seriya 3. Mikroelektronika (2) 33 (2021)
  9. Isakhanov Z A, Yorkulov R M et al J. Synch. Investig. 15 401 (2021)
  10. Volodin V, Gritsenko V et al Nanocrystalline Materials Chapter 2 (2020)
  11. Vasil’ev V Yu Elektronnaya Tekhnika. Seriya 3. Mikroelektronika (1) 31 (2020)
  12. Astankova K N, Volodin V A, Azarov I A Semiconductors 54 1555 (2020)
  13. Perevalov T V, Volodin V A et al Journal Of Non-Crystalline Solids 529 119796 (2020)
  14. Gritsenko V A, Gismatulin A A et al Mater. Res. Express 6 076401 (2019)
  15. Volodin V A, Kamaev G N et al International Conference on Micro- and Nano-Electronics 2018, (2019) p. 33
  16. Lee Ju-H, Kim H-M et al Applied Surface Science 493 125 (2019)
  17. Gritsenko V A, Kruchinin V N et al J. Exp. Theor. Phys. 129 924 (2019)
  18. Perevalov T V, Volodin V A et al Phys. Solid State 61 2560 (2019)
  19. Volodin V A, Rui Zh et al Semiconductors 52 1178 (2018)
  20. Erenburg S B, Trubina S V et al J. Exp. Theor. Phys. 126 816 (2018)
  21. Gritsenko V A, Novikov Yu N et al Adv Elect Materials 4 (9) (2018)
  22. Petrov Yu V, Anikeva A E, Vyvenko O F Nuclear Instruments And Methods In Physics Research Section B: Beam Interactions With Materials And Atoms 425 11 (2018)
  23. Filonenko O V, Lobanov V V Poverhn. 10(25) 118 (2018)
  24. Zamchiy A O, Baranov E A et al Vacuum 152 319 (2018)
  25. Kononova I E, Kononov P V, Moshnikov V A Inorg Mater 54 478 (2018)
  26. Tyschenko I E, Krivyakin G K, Volodin V A Semiconductors 52 268 (2018)
  27. Vlasukova L, Parkhomenko I et al Mater. Res. Express 5 096414 (2018)
  28. Gritsenko V A, Novikov Yu N, Chin A Tech. Phys. Lett. 44 541 (2018)
  29. Volodin V A, Gritsenko V A, Chin A Tech. Phys. Lett. 44 424 (2018)
  30. Gritsenko V A, Volodin V A et al Nanotechnology 29 425202 (2018)
  31. Novak A V, Novak V R et al Semiconductors 52 1953 (2018)
  32. Romanov I A, Parkhomenko I N et al Vescì Akademìì Navuk Belarusì. Seryâ Fizika-matematyčnyh Navuk 54 360 (2018)
  33. Perevalov T V, Gritsenko V A et al Nanotechnology 29 264001 (2018)
  34. Tyschenko I E, Popov V P Advances in Semiconductor Nanostructures (2017) p. 409
  35. Gritsenko V A Uspekhi Fizicheskikh Nauk 187 971 (2017) [Gritsenko V A Phys.-Usp. 60 902 (2017)]
  36. Volodin V A, Cherkov A G et al Mater. Res. Express 4 075010 (2017)
  37. Parkhomenko I, Vlasukova L et al Thin Solid Films 626 70 (2017)
  38. Isomura N, Murai T et al J Synchrotron Rad 24 445 (2017)
  39. Isomura N, Murai T et al Jpn. J. Appl. Phys. 56 081301 (2017)
  40. Kruchinin V N, Aliev V Sh et al Opt. Spectrosc. 121 241 (2016)
  41. Talanin V I, Talanin I E Phys. Solid State 58 2050 (2016)
  42. Ivanova E V, Zamoryanskaya M V et al J. Exp. Theor. Phys. 120 710 (2015)
  43. Bommali R K, Ghosh S et al Mater. Res. Express 2 046204 (2015)
  44. Bommali R K, Ahmad Sh et al 116 (11) (2014)
  45. Nekrashevich S S, Gritsenko V A Phys. Solid State 56 207 (2014)
  46. Vlasukova L A, Komarov F F et al J Appl Spectrosc 80 89 (2013)
  47. Nasyrov K A, Gritsenko V A Uspekhi Fizicheskikh Nauk 183 1099 (2013) [Nasyrov K A, Gritsenko V A Phys.-Usp. 56 999 (2013)]
  48. Gritsenko V A Uspekhi Fizicheskikh Nauk 182 531 (2012)
  49. Bugaev K O, Zelenina A A, Volodin V A International Journal Of Spectroscopy 2012 1 (2012)
  50. Novikov Yu N, Gritsenko V A Phys. Solid State 54 493 (2012)
  51. Volodin V A, Bugaev K O et al Thin Solid Films 520 6207 (2012)
  52. Gritsenko V A, Zhuravlev K S, Nadolinnyi V A Phys. Solid State 53 860 (2011)
  53. Tyschenko I E, Popov V P Semiconductors 45 325 (2011)
  54. Korchagina T T, Volodin V A et al Tech. Phys. Lett. 37 622 (2011)
  55. Nekrashevich S S, Gritsenko V A 110 (11) (2011)
  56. Korchagina T T, Volodin V A, Chichkov B N Semiconductors 44 1611 (2010)
  57. Zatsepin D A, Kaschieva S et al Physica Status Solidi (a) 207 743 (2010)
  58. Nekrashevich S S, Gritsenko V A et al J. Exp. Theor. Phys. 111 659 (2010)
  59. Zatsepin D A, Panin E A et al Phys. Solid State 51 2241 (2009)
  60. Rzodkiewicz W, Panas A J. Phys.: Conf. Ser. 181 012035 (2009)
  61. Korchagina T T, Marin D V et al Semiconductors 43 1514 (2009)
  62. Gritsenko V A Uspekhi Fizicheskikh Nauk 179 921 (2009)
© 1918–2024 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions