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Issue 11, 2024
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Aleksei R. Chelyadinskii
Department of Physics, Belarussian State University
Address:
prosp. F. Skoriny 4, Minsk, 220050, Belarus
Fax:
7 (017) 226 5940, 7 (017) 222 0
Website:
www.belarus.net/universi/BSU
Articles
A.R. Chelyadinskii, F.F. Komarov “
Defect-impurity engineering in implanted silicon
”
Phys. Usp.
46
789–820 (2003)
V.S. Vavilov, A.R. Chelyadinskii “
Impurity ion implantation into silicon single crystals: efficiency and radiation damage
”
Phys. Usp.
38
333–343 (1995)
See also:
V.S. Vavilov
,
F.F. Komarov
PACS:
61.72.Cc
,
61.72.Tt
,
61.72.Yx
,
68.55.Ln
, 78.50.Ge
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