Broadband integrated optical modulators: achievements and prospects

V.M. Petrov^†^a, P.M. Agruzov^‡^b, V.V. Lebedev^§^b, I.V. Il’ichev^*^b, A.V. Shamray^#^b
^aITMO University, Kronverksky Pr. 49, bldg. A, St. Petersburg, 197101, Russian Federation
^bIoffe Institute, ul. Polytekhnicheskaya 26, St. Petersburg, 194021, Russian Federation

Broadband integrated optical modulators are key elements of modern optical information systems. The three main technological material platforms for their manufacture are considered: lithium niobate, III—V semiconductors, and silicon. Progress achieved in the development of integrated optical modulators is analyzed, and the main parameters of modulators obtained for various materials are compared with requirements for practical applications. Directions in the further development of the technology of modulators related to new problems in optical information systems are discussed.

Correspondence should be addressed to
Keywords: electro-optic effect, microwave integrated optical modulators
PACS: 42.79.−e, 42.79.Hp, 78.20.Ls (all)
DOI: 10.3367/UFNe.2020.11.038871
URL: https://ufn.ru/en/articles/2021/7/d/
Web of Science

000702491600004
Scopus

2-s2.0-85116881680
ADS NASA

2021PhyU...64..722P
Citation: Petrov V M, Agruzov P M, Lebedev V V, Il’ichev I V, Shamray A V "Broadband integrated optical modulators: achievements and prospects" Phys. Usp. 64 722–739 (2021)

BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 20th, May 2020, revised: 16th, November 2020, accepted: 18th, November 2020

Оригинал: Петров В М, Агрузов П М, Лебедев В В, Ильичев И В, Шамрай А В «Широкополосные интегрально-оптические модуляторы: достижения и перспективы развития» УФН 191 760–780 (2021); DOI: 10.3367/UFNr.2020.11.038871

References (179) Cited by (35) Similar articles (20) ↓

A.S. Pirozhkov, E.N. Ragozin “Aperiodic multilayer structures in soft X-ray optics” Phys. Usp. 58 1095–1105 (2015)
E.N. Ragozin, E.A. Vishnyakov et al “Soft X-ray spectrometers based on aperiodic reflection gratings and their application” Phys. Usp. 64 495–514 (2021)
V.Yu. Khomich, V.A. Shmakov “Large-sized mirrors for power optics” Phys. Usp. 62 249–256 (2019)
V.V. Lider “X-ray fluorescence imaging” Phys. Usp. 61 980–999 (2018)
A.E. Ieshkin, A.B. Tolstoguzov et al “Gas-dynamic sources of cluster ions for basic and applied research” Phys. Usp. 65 677–705 (2022)
I.Yu. Eremchev, D.V. Prokopova et al “Three-dimensional fluorescence nanoscopy of single quantum emitters based on the optics of spiral light beams” Phys. Usp. 65 617–626 (2022)
M.M. Barysheva, A.E. Pestov et al “Precision imaging multilayer optics for soft X-rays and extreme ultraviolet bands” Phys. Usp. 55 681–699 (2012)
S.L. Andrianov, E.Yu. Grachev, A.A. Trubitsyn “Electron beam inspection of semiconductor wafers” Phys. Usp., accepted
V.N. Ochkin “Spectroscopy of small gas components of a nonequilibrium low-temperature plasma” Phys. Usp. 65 1071–1103 (2022)
V.V. Busarev, V.V. Prokof’eva-Mikhailovskaya, V.V. Bochkov “Spectral and spectral-frequency methods of investigating atmosphereless bodies of the Solar system” Phys. Usp. 50 637–647 (2007)
A.I. Protsenko, A.E. Blagov et al “QEXAFS method implementation using adaptive X-ray optical elements” Phys. Usp. 64 83–87 (2021)
M.A. Proskurnin, V.R. Khabibullin et al “Photothermal and optoacoustic spectroscopy: state of the art and prospects” Phys. Usp. 65 270–312 (2022)
V.P. Savinykh, I.Yu. Vasyutinsky, D.V. Dement’ev “Vertical refraction of light in the atmospheric surface layer: traditional problems of determining refraction and new technical achievements” Phys. Usp. 65 864–879 (2022)
S.A. Pshenichnyuk, N.L. Asfandiarov et al “State of the art in dissociative electron attachment spectroscopy and its prospects” Phys. Usp. 65 163–188 (2022)
A.I. Protsenko, I.A. Eliovich et al “Investigation of the dynamics of the Belousov—Zhabotinsky reaction by time-resolved X-ray absorption spectroscopy using adaptive X-ray optical elements” Phys. Usp. 66 1258–1261 (2023)
A.V. Eletskii, Kh.L. Dao “Graphene-based supercapacitors” Phys. Usp. 68 597–616 (2025)
A.S. Bugaev, P.A. Eroshkin et al “Low-power X-ray tubes: the current status” Phys. Usp. 56 691–703 (2013)
I.V. Antonova “Chemical vapor deposition growth of graphene on copper substrates: current trends” Phys. Usp. 56 1013–1020 (2013)
Ya.S. Greenberg, Yu.A. Pashkin, E. Il’ichev “Nanomechanical resonators” Phys. Usp. 55 382–407 (2012)
V.I. Gvozdev, G.A. Kuzaev et al “Physical principles of the modeling of three-dimensional microwave and extremely high frequency integrated circuits” Sov. Phys. Usp. 35 (3) 212–230 (1992)

The list is formed automatically.