Reactive diffusion in multilayer metal/silicon nanostructures

Reactive diffusion in nanomaterials differs widely from that in bulk materials. Reviewed in this paper are the basic models and experimental data on how diffusion and phase transformations occur in multilayer nanosystems as these are being prepared and subsequently thermally annealed. The growth kinetics of amorphous silicide phases in Sc/Si and Mo/Si multilayer periodic systems are studied using the combination of high-resolution transmission electron microscopy and small-angle X-ray diffraction. A model is proposed for silicon diffusion through amorphous silicide that undergoes structural relaxation and crystallization as it grows. Anisotropic diffusion and growth of the silicide phase at adjacent interfaces are studied, and the diffusion parameters are measured for the earliest stages of diffusion annealing.

PACS: 66.30.−h, 68.35.Fx, 68.65.−k (all)
DOI: 10.3367/UFNe.0181.201105c.0491
URL: https://ufn.ru/en/articles/2011/5/c/
Web of Science

000294814900003
Scopus

2-s2.0-80051862417
ADS NASA

2011PhyU...54..473Z
Citation: Zubarev E N "Reactive diffusion in multilayer metal/silicon nanostructures" Phys. Usp. 54 473–498 (2011)

BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 24th, June 2010, accepted: 21st, September 2010

Оригинал: Зубарев Е Н «Реакционная диффузия в наноразмерных слоистых системах металл/кремний» УФН 181 491–520 (2011); DOI: 10.3367/UFNr.0181.201105c.0491

References (143) Cited by (27) Similar articles (20) ↓

V.V. Lider “Multilayer X-ray interference structures” 62 1063–1095 (2019)
S.V. Demishev, Yu.V. Kosichkin et al “Amorphous semiconductors prepared by quenching under high pressure” 37 185–217 (1994)
D.K. Belashchenko “Diffusion mechanisms in disordered systems: computer simulation” 42 297–319 (1999)
I.K. Razumov, A.Y. Yermakov et al “Nonequilibrium phase transformations in alloys under severe plastic deformation” 63 733–757 (2020)
M.V. Kuznetsov, A.S. Razinkin, A.L. Ivanovskii “Oxide nanostructures on a Nb surface and related systems: experiments and ab initio calculations” 53 995–1014 (2010)
V.I. Punegov “High-resolution X-ray diffraction in crystalline structures with quantum dots” 58 419–445 (2015)
V.P. Zhdanov, K.I. Zamaraev “Lattice-gas model of chemisorption on metal surfaces” 29 755–776 (1986)
A.I. Volokitin, B.N.J. Persson “Radiative heat transfer and noncontact friction between nanostructures” 50 879–906 (2007)
A.G. Syromyatnikov, S.V. Kolesnikov et al “Formation and properties of metallic atomic chains and wires” 64 671–701 (2021)
M.A. Remnev, V.V. Klimov “Metasurfaces: a new look at Maxwell's equations and new ways to control light” 61 157–190 (2018)
Ya.E. Geguzin, N.N. Ovcharenko “Surface energy and surface processes in solids” 5 129–157 (1962)
T.V. Tropin, Ju.W.P. Schmelzer, V.L. Aksenov “Modern aspects of the kinetic theory of glass transition” 59 42–66 (2016)
V.N. Mineev, A.I. Funtikov “Viscosity measurements on metal melts at high pressure and viscosity calculations for the earth’s core” 47 671–686 (2004)
V.I. Balykin, P.N. Melentiev “Optics and spectroscopy of a single plasmonic nanostructure” 61 133–156 (2018)
D.S. Sanditov, M.I. Ojovan “Relaxation aspects of the liquid—glass transition” 62 111–130 (2019)
A.V. Gapontsev, V.V. Kondrat’ev “Hydrogen diffusion in disordered metals and alloys” 46 1077–1098 (2003)
V.V. Brazhkin, A.G. Lyapin et al “Where is the supercritical fluid on the phase diagram?” 55 1061–1079 (2012)
V.V. Aristov, L.G. Shabel’nikov “Recent advances in X-ray refractive optics” 51 57–77 (2008)
V.A. Gritsenko “Atomic structure of the amorphous nonstoichiometric silicon oxides and nitrides” 51 699–708 (2008)
A.A. Shklyaev, M. Ichikawa “Extremely dense arrays of germanium and silicon nanostructures” 51 133–161 (2008)

The list is formed automatically.