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Reviews of topical problems


Reactive diffusion in multilayer metal/silicon nanostructures


National Technical University Kharkiv Polytechnical Institute, ul. Frunze 21, Kharkov, 61002, Ukraine

Reactive diffusion in nanomaterials differs widely from that in bulk materials. Reviewed in this paper are the basic models and experimental data on how diffusion and phase transformations occur in multilayer nanosystems as these are being prepared and subsequently thermally annealed. The growth kinetics of amorphous silicide phases in Sc/Si and Mo/Si multilayer periodic systems are studied using the combination of high-resolution transmission electron microscopy and small-angle X-ray diffraction. A model is proposed for silicon diffusion through amorphous silicide that undergoes structural relaxation and crystallization as it grows. Anisotropic diffusion and growth of the silicide phase at adjacent interfaces are studied, and the diffusion parameters are measured for the earliest stages of diffusion annealing.

Fulltext is available at IOP
PACS: 66.30.−h, 68.35.Fx, 68.65.−k (all)
DOI: 10.3367/UFNe.0181.201105c.0491
URL: https://ufn.ru/en/articles/2011/5/c/
Citation: Zubarev E N "Reactive diffusion in multilayer metal/silicon nanostructures" Phys. Usp. 54 473–498 (2011)
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Received: 24th, June 2010, 21st, September 2010

:    «   /» 181 491–520 (2011); DOI: 10.3367/UFNr.0181.201105c.0491

References (143) Cited by (21) Similar articles (20) ↓

  1. V.V. Lider “Multilayer X-ray interference structures62 1063–1095 (2019)
  2. S.V. Demishev, Yu.V. Kosichkin et alAmorphous semiconductors prepared by quenching under high pressure37 185–217 (1994)
  3. D.K. Belashchenko “Diffusion mechanisms in disordered systems: computer simulation42 297–319 (1999)
  4. I.K. Razumov, A.Y. Yermakov et alNonequilibrium phase transformations in alloys under severe plastic deformation63 733–757 (2020)
  5. M.V. Kuznetsov, A.S. Razinkin, A.L. Ivanovskii “Oxide nanostructures on a Nb surface and related systems: experiments and ab initio calculations53 995–1014 (2010)
  6. V.I. Punegov “High-resolution X-ray diffraction in crystalline structures with quantum dots58 419–445 (2015)
  7. V.P. Zhdanov, K.I. Zamaraev “Lattice-gas model of chemisorption on metal surfaces29 755–776 (1986)
  8. A.I. Volokitin, B.N.J. Persson “Radiative heat transfer and noncontact friction between nanostructures50 879–906 (2007)
  9. M.A. Remnev, V.V. Klimov “Metasurfaces: a new look at Maxwell's equations and new ways to control light61 157–190 (2018)
  10. Ya.E. Geguzin, N.N. Ovcharenko “Surface energy and surface processes in solids5 129–157 (1962)
  11. A.G. Syromyatnikov, S.V. Kolesnikov et alFormation and properties of metallic atomic chains and wires”, accepted
  12. T.V. Tropin, Ju.W.P. Schmelzer, V.L. Aksenov “Modern aspects of the kinetic theory of glass transition59 42–66 (2016)
  13. V.N. Mineev, A.I. Funtikov “Viscosity measurements on metal melts at high pressure and viscosity calculations for the earth’s core47 671–686 (2004)
  14. V.I. Balykin, P.N. Melentiev “Optics and spectroscopy of a single plasmonic nanostructure61 133–156 (2018)
  15. D.S. Sanditov, M.I. Ojovan “Relaxation aspects of the liquid—glass transition62 111–130 (2019)
  16. A.V. Gapontsev, V.V. Kondrat’ev “Hydrogen diffusion in disordered metals and alloys46 1077–1098 (2003)
  17. V.V. Brazhkin, A.G. Lyapin et alWhere is the supercritical fluid on the phase diagram?55 1061–1079 (2012)
  18. A.A. Shklyaev, M. Ichikawa “Extremely dense arrays of germanium and silicon nanostructures51 133–161 (2008)
  19. V.V. Aristov, L.G. Shabel’nikov “Recent advances in X-ray refractive optics51 57–77 (2008)
  20. V.A. Gritsenko “Atomic structure of the amorphous nonstoichiometric silicon oxides and nitrides51 699–708 (2008)

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