Issues

 / 

2011

 / 

May

  

Reviews of topical problems


Reactive diffusion in multilayer metal/silicon nanostructures


National Technical University Kharkiv Polytechnical Institute, ul. Frunze 21, Kharkov, 61002, Ukraine

Reactive diffusion in nanomaterials differs widely from that in bulk materials. Reviewed in this paper are the basic models and experimental data on how diffusion and phase transformations occur in multilayer nanosystems as these are being prepared and subsequently thermally annealed. The growth kinetics of amorphous silicide phases in Sc/Si and Mo/Si multilayer periodic systems are studied using the combination of high-resolution transmission electron microscopy and small-angle X-ray diffraction. A model is proposed for silicon diffusion through amorphous silicide that undergoes structural relaxation and crystallization as it grows. Anisotropic diffusion and growth of the silicide phase at adjacent interfaces are studied, and the diffusion parameters are measured for the earliest stages of diffusion annealing.

Fulltext is available at IOP
PACS: 66.30.−h, 68.35.Fx, 68.65.−k (all)
DOI: 10.3367/UFNe.0181.201105c.0491
URL: https://ufn.ru/en/articles/2011/5/c/
Citation: Zubarev E N "Reactive diffusion in multilayer metal/silicon nanostructures" Phys. Usp. 54 473–498 (2011)
BibTexBibNote ® (generic)BibNote ® (RIS)MedlineRefWorks

Received: 24th, June 2010, 21st, September 2010

:    «   /» 181 491–520 (2011); DOI: 10.3367/UFNr.0181.201105c.0491

References (143) ↓ Cited by (21) Similar articles (20)

  1. Geguzin Ya E Diffuzionnaya Zona (M.: Nauka, 1979)
  2. Tu K-N, Mayer J W, Feldman L C Electronic Thin Film Science: For Electrical Engineers And Materials Scientists (New York: Macmillan, 1992)
  3. Brik V B Diffuziya i Fazovye Prevrashcheniya v Metallakh i Splavakh (Kiev: Naukova dumka, 1985)
  4. Holloway K, Do K B, Sinclair R J. Appl. Phys. 65 474 (1989)
  5. Murarka S P Silicides For VLSK Applications (New York: Academic Press, 1983); M’yurarka Sh Silitsidy dlya SBIS (M.: Mir, 1986)
  6. Poate J M, Tu K N, Mager J W (Eds) Thin Pilms-Interdiffusion And Reactions (New York: Wiley, 1978); Pout Dzh, Tu K N, Meier Dzh (Red.) Tonkie Plenki. Vzaimnaya Diffuziya i Reaktsii (M.: Mir, 1982)
  7. Walser R M, Bene R W Appl. Phys. Lett. 28 624 (1976)
  8. Shewmon P G Diffusion In Solids (New York: McGraw-Hill, 1963); Sh’yumon P Diffuziya v Tverdykh Telakh (M.: Metallurgiya, 1966)
  9. Mader S Thin Solid Films 35 195 (1976)
  10. Gösele U, Tu K N J. Appl. Phys. 53 3252 (1982)
  11. Tu K N Annu. Rev. Mater. Sci. 15 147 (1985)
  12. Schwarz R B, Johnson W L Phys. Rev. Lett. 51 415 (1983)
  13. Koch S S et al. Appl. Phys. Lett. 43 1017 (1983)
  14. Cotts E J, Meng W J, Johnson W L Phys. Rev. Lett. 57 2295 (1986)
  15. Cotts E J, Wong G C, Johnson W L Phys. Rev. B 37 9049 (1988)
  16. Meng W J, Nieh C W, Johnson W L Appl. Phys. Lett. 51 1693 (1987)
  17. Dörner W, Mehrer H Phys. Rev. B 44 101 (1991)
  18. Donovan E P et al. J. Appl. Phys. 57 1795 (1985)
  19. Donovan E P et al. Appl. Phys. Lett. 42 698 (1983)
  20. Petford-Long A K et al. J. Appl. Phys. 61 1422 (1987)
  21. Bugaev E A et al. Surface Investigation 15 141 (1999)
  22. Slaughter J M et al. Pros. SPIE 1343 73 (1991)
  23. Holloway K, Sinclair R J. Appl. Phys. 61 1359 (1987)
  24. Holloway K, Sinclair R J. Less Common Met. 140 139 (1988)
  25. Nathan M J. Appl. Phys. 63 5534 (1988)
  26. Gong S F et al. J. Appl. Phys. 68 4535 (1990)
  27. Ma E et al. Appl. Phys. Lett. 53 2033 (1988)
  28. Wang W H, Wang W K J. Appl. Phys. 76 1578 (1994)
  29. Tu K N, Herd S R, Gösele U Phys. Rev. B 43 1198 (1991)
  30. Chen J C, Shen G H, Chen L J J. Appl. Phys. 84 6083 (1998)
  31. Kjornrattanawanich B et al. Appl. Opt. 45 1765 (2006)
  32. Gong S F, Hentzell H T G J. Appl. Phys. 68 4542 (1990)
  33. Miedema A R J. Less Common Met. 46 67 (1976)
  34. Bené R W J. Appl. Phys. 61 1826 (1987)
  35. Gösele U, Tu K N J. Appl. Phys. 66 2619 (1989)
  36. Stearns D G, Rosen R S, Vernon S P Proc. SPIE 1547 2 (1992)
  37. Slaughter J M et al. J. Appl. Phys. 76 2144 (1994)
  38. Andreev S S et al. Thin Solid Films 415 123 (2002)
  39. Becker H et al. Proc. SPIE 4688 503 (2002)
  40. Bajt S, Stearns D G, Kearney P A J. Appl. Phys. 90 1017 (2001)
  41. Stearns M B, Chang C-H, Stearns D G J. Appl. Phys. 71 187 (1992)
  42. Voorma H-J et al. J. Appl. Phys. 83 4700 (1998)
  43. Niibe M et al. Proc. SPIE 1343 2 (1991)
  44. Voorma H-J et al. J. Appl. Phys. 82 1876 (1997)
  45. Yakshin A E et al. Physica B 283 143 (2000)
  46. Cilia M, Verhoeven J J. Appl. Phys. 82 4137 (1997)
  47. Cheng Y et al. J. Appl. Phys. 72 5165 (1992)
  48. Stearns D G et al. J. Appl. Phys. 67 2415 (1990)
  49. Windt D L, Hull R, Waskiewicz W K J. Appl. Phys. 71 2675 (1992)
  50. Boercker D B, Morgan W L Proc. SPIE 1547 47 (1992)
  51. Slaughter J M et al. Phys. Rev. B 44 3854 (1991)
  52. Bedrossian P J Surf. Sci. 320 247 (1994)
  53. Bedrossian P J Surf. Sci. 322 73 (1995)
  54. Vernon S P, Stearns D G, Rosen R S Appl. Opt. 32 6969 (1993)
  55. Hasan M M, Highmore R J, Somekh R E Vacuum 43 55 (1992)
  56. Birch J et al. Vacuum 68 275 (2002)
  57. Zhou X W, Wadley H N G J. Appl. Phys. 84 2301 (1998)
  58. Eriksson F et al. Thin Solid Films 500 84 (2006)
  59. Louis E et al. Proc. SPIE 3997 406 (2000)
  60. Folta J A et al. Proc. SPIE 3676 702 (1999)
  61. Bajt S et al. Proc. SPIE 4506 65 (2000)
  62. Shimizu M et al. Jpn. J. Appl. Phys. 32 4074 (1993)
  63. Feigl T et al. Proc. SPIE 3997 420 (2000)
  64. Yulin S A et al. Proc. SPIE 4343 607 (2001)
  65. Yulin S A et al. Proc. SPIE 5645 289 (2005)
  66. Yulin S et al. Proc. SPIE 5751 1155 (2005)
  67. Yulin S et al. Microelectron. Eng. 83 692 (2006)
  68. Gautier J et al. Appl. Opt. 44 384 (2005)
  69. Shih W C, Stobbs W M Ultramicroscopy 32 219 (1990)
  70. Burkhalter P G et al. J. Vac. Sci. Technol. B 9 845 (1991)
  71. Kortright J B, Joksch St, Ziegler E J. Appl. Phys. 69 168 (1991)
  72. Windt D L J. Vac. Sci. Technol. A 18 980 (2000)
  73. Salditt T, Metzger T H, Peisl J Phys. Rev. Lett. 73 2228 (1994)
  74. Salditt T et al. Phys. Rev. B 54 5860 (1996)
  75. Windt D L et al. J. Appl. Phys. 88 460 (2000)
  76. Bower R W, Mayer J W Appl. Phys. Lett. 20 359 (1972)
  77. Guivarc’h A et al. J. Appl. Phys. 49 233 (1978)
  78. Bravman J C, Sinclair R J. Electron. Microsc. Tech. 1 53 (1984)
  79. Cheng J Y, Cheng H G, Chen L J J. Appl. Phys. 61 2218 (1987)
  80. Rosen R S et al. Appl. Opt. 32 6975 (1993)
  81. Cage P R, Bartlett R W Trans. Metall. Soc. AIME 233 832 (1965)
  82. Sloof W G et al. Scripta Metall. 20 1683 (1986)
  83. Nakajima H, Fujimori H, Masahiro K J. Appl. Phys. 63 1046 (1988)
  84. Wang W-H et al. Phys. Rev. B 59 10811 (1999)
  85. Cook H E, Hilliard J E J. Appl. Phys. 40 2191 (1969)
  86. Loopstra O B et al. Phys. Rev. B 44 13519 (1991)
  87. Cohen M H, Turnbull D J. Chem. Phys. 31 1164 (1959)
  88. Cohen M H, Grest G S Phys. Rev. B 20 1077 (1979)
  89. Spaepen F Mater. Sci. Eng. 97 403 (1988)
  90. Sietsma J, Thijsse B J Phys. Rev. B 52 3248 (1995)
  91. Danilin B S, Syrchin V K Magnetronnye Raspylitel’nye Sistemy (M.: Radio i svyaz’, 1982)
  92. Patelli A et al. Surf. Coat. Technol. 201 143 (2006)
  93. Somekh R E J. Vac. Sci. Technol. A 2 1285 (1984)
  94. Williams D B, Carter B C Transmission Electron Microscopy. A Textbook For Materials Science (New York: Springer-Science Business Media, 2009)
  95. Barbee T W Opt. Eng. 25 899 (1986)
  96. Spiller E Soft X-Ray Optics (Washington: SPIE Optical Engineering Press, 1994)
  97. Stearns D G J. Appl. Phys. 65 491 (1989)
  98. Vinogradov A V i dr. Zerkal’naya Rentgenovskaya Optika (Pod red. A V Vinogradova) (L.: Mashinostroenie, 1989)
  99. Zubarev E N i dr. Metallofiz. Noveish. Tekhnol. (8) 56 (1997)
  100. Yulin S et al. J. App. Phys. 92 1216 (2002)
  101. Zubarev E N i dr. Poverkhnost’. Rentgen., Sinkhrotron., Neitron. Issled. (2) 20 (2002)
  102. Zubarev E N i dr. Tezisy Dokladov IKh Natsional’noi Konf. Po Rostu Kristallov, 16 - 20 Oktyabrya 2000, Moskva (M.: IK RAN, 2000) p. 528
  103. Kondratenko V V et al. Appl. Opt. 32 1811 (1993)
  104. Fedorenko A I et al. Funktsional’nye Materialy (2) 33 (1994)
  105. Zubarev E N i dr. Metallofiz. Noveishie Tekhnol. (10) 1429 (2002)
  106. Pinegyn V I et al. Thin Solid Films 516 2973 (2008)
  107. Zubarev E N et al. Book Abstracts of 12th Intern. Conf. on Thin Films, Bratislava, Slovakia 15 - 20 September 2002 p. 212
  108. Nastasi M, Mayer J W Mater. Sci. Eng. R 12 1 (1994)
  109. Volobuev V V i dr. Nauchnye Trudy NAN Ukrainy. Nanostrukturnye Materialy (Kiev: In-t problem materialovedeniya, 1998) p. 141
  110. Uspenskii Yu A et al. Opt. Lett. 23 771 (1998)
  111. Uspenskii Yu A et al. Surface Investigation 15 103 (1999)
  112. Uspenskii Yu A et al. Nucl. Instrum. Meth. Phys. Res. A 448 147 (2000)
  113. Fedorenko A I et al. J. X-Ray Sci. Technol. (9) 35 (2001)
  114. Zubarev E N i dr. Vest. Khar’kovskogo Nats. Un. Ser. Fizika (739) 141 (2006)
  115. Voronov D L i dr. Tezisy Dokladov IKh Natsional’noi Konf. Po Rostu Kristallov, 16 - 20 Oktyabrya 2000, Moskva (M.: IK RAN, 2000) p. 529
  116. Voronov D L i dr. Rentgenovskaya Optika — 2001: Materialy Soveshch., Nizhnii Novgorod, 19 - 22 Fevralya 2001 G. (N. Novgorod: In-t fiziki mikrostruktur RAN, 2001) p. 48
  117. Vinogradov A V et al. Proc. SPIE 4505 230 (2001)
  118. Voronov D L i dr. Poverkhnost’. Rentgen., Sinkhrotron., Neitron. Issled. (1) 6 (2002)
  119. Voronov D L et al. AIP Conf. Proc. 641 575 (2002)
  120. Voronov D L i dr. Poverkhnost’. Rentgen., Sinkhrotron., Neitron. Issled. (5) 13 (2007)
  121. Voronov D L et al. Book Abstracts 10th Intern. Conf. on X-Ray Lasers, Berlin, Germany 21 - 25 August 2006 p. 115
  122. Voronov D L et al. Functional Mater. (5) 856 (1999)
  123. Voronov D L et al. Functional Mater. 15 (1) 30 (2008)
  124. Voronov D L i dr. Materialy V Mezhdunar. konf. "Nelineinye protsessy i problemy samoorganizatsii v sovremennom materialovedenii", 3 - 5 oktyabrya, 2004 g., Voronezh Vol. 1 (Voronezh, 2004) p. 117
  125. Voronov D L et al. Book Abstracts of The 9th Intern. Conf. on the Physics of X-ray Multilayer Structures, Montana, USA 3 - 7 February 2008 p. 2.3
  126. Voronov D L i dr. Poverkhnost’. Rentgen., Sinkhrotron., Neitron. Issled. (2) 75 (2002)
  127. Voronov D L et al. Functional. Mater. 9 (3) 534 (2002)
  128. Voronov D L i dr. Rentgenovskaya optika-99: Materialy soveshch., Nizhnii Novgorod, 1 - 4 marta 1999 g. (N. Novgorod: In-t fiziki mikrostruktur, 1999) p. 138
  129. Voronov D L i dr. Materialy Tret’ego mezhdunarod. nauchnogo seminara "Sovremennye metody analiza difraktsionnykh dannykh (topografiya, difraktometriya, elektronnaya mikroskopiya)", 22 - 25 maya 2006 g., Velikii Novgorod (Novgorod, 2006) p. 135
  130. Kotroczo V, McColm I J J. Alloys Compounds 203 259 (1994)
  131. Samsonov G V, Dvorina L A, Rud’ B M Silitsidy (M.: Metallurgiya, 1979)
  132. Tardy J, Tu K N Phys. Rev. B 32 2070 (1985)
  133. Voronov D L et al. Thin Solid Films 513 152 (2006)
  134. Gössele U, Tu K N, Thompson R D J. Appl. Phys. 53 8759 (1982)
  135. Penkov A V et al. Functional Mater. 12 (4) 750 (2005)
  136. Devizenko O Yu et al. Abstract Book of the Intern. Conf. Crystal Materials’ 2005 (Kharkov, 2005) p. 211
  137. Palatnik L S, Fuks M Ya, Kosevich V M Mekhanizm Obrazovaniya i Substruktura Kondensirovannykh Plenok (M.: Nauka, 1972)
  138. Frantsevich I P, Voronov F F, Bakuta S A Uprugie Postoyannye i Moduli Uprugosti Metallov i Nemetallov. Spravochnik (Kiev: Naukova dumka, 1982)
  139. Bullough R Ann. Chim. 9 255 (1984)
  140. Kuramoto E J. Nucl. Mater. 122 422 (1984)
  141. Charai A, Boulesteix C Phys. Status Solidi A 80 333 (1983)
  142. Palatnik L S i dr. Kristallogr. 32 445 (1987)
  143. Malhotra S G et al. J. Appl. Phys. 79 6872 (1996)

© 1918–2021 Uspekhi Fizicheskikh Nauk
Email: ufn@ufn.ru Editorial office contacts About the journal Terms and conditions