High-resolution X-ray diffraction in crystalline structures with quantum dots
Komi Scientific Center, Ural Branch of the Russian Academy of Sciences, ul. Chernova 3a, Syktyvkar, Respublika Komi, 167982, Russian Federation
This review presents the current status of nondestructive high-resolution X-ray diffractometry research on semiconductor structures with quantum dots (QDs). The formalism of the statistical theory of diffraction is used to consider the coherent and diffuse X-ray scattering in crystalline systems with nanoinclusions. The effects of shape, elastic deformations and of lateral and vertical QD correlation on the diffuse scattering angular distribution near reciprocal lattice nodes are considered. Using short-period and multicomponent superlattices as an example, the efficiency of data-assisted modeling in the quantitative analysis of nanostructured materials is demonstrated.