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1989

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September

  

Book reviews


Physics and technology of submicron structures


Lebedev Physical Institute, Russian Academy of Sciences, Leninsky prosp. 53, Moscow, 119991, Russian Federation
Fulltext pdf (42 KB)
Fulltext is also available at DOI: 10.1070/PU1989v032n09ABEH002763
PACS: 01.30.Vv, 85.30.−z (all)
DOI: 10.1070/PU1989v032n09ABEH002763
URL: https://ufn.ru/en/articles/1989/9/i/
Citation: Idlis B G "Physics and technology of submicron structures" Sov. Phys. Usp. 32 834–834 (1989)
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Оригинал: Идлис Б Г «Физика и технология субмикронных структур» УФН 159 188–189 (1989); DOI: 10.3367/UFNr.0159.198909j.0188

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